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Microsystem Technologies

, Volume 24, Issue 9, pp 3851–3861 | Cite as

Design of a biaxial high frequency-ratio low-g MEMS accelerometer

  • Xiaowei Shan
  • Jorge Angeles
  • James Richard Forbes
Technical Paper
  • 66 Downloads

Abstract

The optimum design of a biaxial MEMS accelerometer for low-g applications, along with its fabrication and testing, is reported in this paper. The monolithic structure was optimally designed based on a fully symmetric architecture with a high frequency ratio between the insensitive and the sensitive axes. The sensing substructure was designed, in turn, with a configurable comb-structure for simultaneous biaxial capacitive sensing. This accelerometer was fabricated with high precision and tested under 1-g acceleration, both statically and dynamically. The corresponding static sensitivity is 1.55 μm/g, while the capacitance sensitivity is 113.5 fF/g.

Notes

Acknowledgements

We would like to acknowledge CMC Microsystems for the provision of services that facilitated this research work. NSERC’s support through a Discovery Grant is dutifully acknowledged. NSERC is Canada’s Natural Sciences and Engineering Research Council. The support of FRQNT (Fonds de recherche du Québec-Nature et technologies) through the New University Researchers Start-up Program is gratefully acknowledged. The MEDA scholarship from McGill University supported the first author at her PhD studies on biaxial accelerometers. The second author acknowledges the support provided by a James McGill Professorship.

References

  1. ANSYS, Inc. (2012) Design exploration user guide (online). http://www.mecheng.osu.edu/documentation/Fluent14.5/145/wb_dx.pdf
  2. Cardou P (2007) Design of multiaxial accelerometers with simplicial architectures for rigid-body pose-and-twist estimation, Ph.D. thesis. Department of Mechanical Engineering, McGill University, MontrealGoogle Scholar
  3. CMC Microsystems (2014) Design Handbook: Micralyne MicraGEM-Si™ (ICI-319) (online). https://www.cmc.ca/en/WhatWeOffer/Products/CMC-00200-03036.aspx
  4. Comi C, Corigliano A, Langfelder G, Tocchio A (2013) Compact biaxial micromachined resonant accelerometer. J Micromech Microeng 23(10):105012CrossRefGoogle Scholar
  5. Dong J, Pengwang E, Ferreira P (2008) A SOI-MEMS-based 3-DOF planar parallel-kinematics nanopositioning stage. Sens Actuators A Phys 147(1):340–351CrossRefGoogle Scholar
  6. Dosch J (2007) Low frequency accelerometer calibration using earth’s gravity. In: Conference and exposition on structural dynamics, OrlandoGoogle Scholar
  7. Han FT, You PC, Zhang L, Yan XJ (2015) Experimental study of a low-\(g\) micromachined electrostatically suspended accelerometer for space applications. Microsyst Technol 21(1):29–39CrossRefGoogle Scholar
  8. Herrera-May AL, Bandala-Sanchez M (2013) Design and modeling of a single-mass biaxial capacitive accelerometer based on the SUMMiT V process. Microsyst Technol 19(12):1997–2009CrossRefGoogle Scholar
  9. Kulah H, Najafi K (2004) An in-plane high-sensitivity, low-noise micro-\(g\) silicon accelerometer with CMOS readout circuitry. J Microelectromech Syst 13(4):628–635CrossRefGoogle Scholar
  10. Lee JS, Lee SS (2008) An isotropic suspension system for a biaxial accelerometer using electroplated thick metal with a HAR SU-8 mold. J Micromech Microeng 18(2):025036CrossRefGoogle Scholar
  11. Senturia SD (2002) Microsystem design. Kluwer Academic Publishers, DordrechtGoogle Scholar
  12. Shan X, Zou T, Forbes J, Angeles J (2014) Design of biaxial navigation-grade MEMS accelerometers. IMECE2014-37280. In: Proceedings of the ASME 2014 international mechanical engineering congress and exposition (IMECE2014), Montreal. 10.1115/IMECE2014-37280Google Scholar
  13. Shan X, Angeles J, Forbes JR (2017) Design, fabrication, and testing of a monolithic biaxial architecture for MEMS accelerometers. Technical Report TR-CIM 15 02 01, Department of Mechanical Engineering and Centre for Intelligent Machines, McGill University, MontrealGoogle Scholar
  14. Swiler TP, Krishnamoorthy U, Clews PJ, Baker MS, Tanner DM (2008) Challenges of designing and processing extreme low-G micro electrical–mechanical system (MEMS) accelerometers, art. no. 68840o. In: Proceedings of SPIE, vol 6884. The International Society for Optical EngineeringGoogle Scholar
  15. Texas Instruments, Inc (2004) Fdc1004: basics of capacitive sensing and applications (online). http://www.ti.com/lit/an/snoa927/snoa927.pdf
  16. Touboul P, Kielbasa R (1999) Capacitive detection scheme for space accelerometers applications. Senso Actuators A Phys 78(2–3):92–98Google Scholar
  17. Wohlhart K (1992) Displacement analysis of the general spatial parallelogram manipulator. In: Proceedings of third international workshop on advances in robot kinematics, Ferrara, pp 104–111Google Scholar
  18. Zhang X, Dong J, Salapaka SM, Ferreira PM (2012) A 2 degree-of-freedom SOI-MEMS translation stage with closed-loop positioning. J Microelectromech Syst 21(1):13–22CrossRefGoogle Scholar
  19. Zhao H, Dai B, Liu X (2015) A new silicon biaxial decoupled resonant micro-accelerometer. Microsyst Technol 21(1):109–115CrossRefGoogle Scholar
  20. Zhao J, Ju B, Xie J (2016) A high-sensitivity biaxial resonant accelerometer with two-stage microleverage mechanisms. J Micromech Microeng 26(1):15011CrossRefGoogle Scholar
  21. Zou T (2013) Design of biaxial accelerometers for rigid-body pose-and-twist estimation, Ph.D. thesis. Department of Mechanical Engineering, McGill University, MontrealGoogle Scholar
  22. Zou T, Angeles J (2014) Isotropic accelerometer strapdowns and related algorithms for rigid-body pose and twist estimation. J Appl Mech 81(11):1–13CrossRefGoogle Scholar

Copyright information

© Springer-Verlag GmbH Germany, part of Springer Nature 2018

Authors and Affiliations

  1. 1.McGill Centre for Intelligent Machines & Department of Mechanical EngineeringMcGill UniversityMontrealCanada

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