Microsystem Technologies

, Volume 24, Issue 11, pp 4631–4639 | Cite as

Biaxial scanning mirror with large rotation angle and low resonance frequency for LIDAR application

  • Buhyun Shin
  • Dongho Oh
  • Kyung-min Lee
Technical Paper


We propose a biaxial scanning mirror with a large rotation angle and low resonance frequency for a compact and low-power-consuming LIDAR. The scanning mirror in LIDAR, which is driven by a rotating motor, requires a wide field of view and a low working frequency. To achieve these requirements, we develop an electromagnetic actuator for a biaxial scanning mirror that consists of two pairs of coils, one yoke with a cross shape, one rare-earth permanent magnet, and one gimbal structure frame. The gap distance between the permanent magnet and yoke is adjusted to find the optimum condition. The overall size of the developed system is 20 mm × 20 mm × 12 mm (width × depth × height) with a gap distance of 3 mm. Experiments and simulations are performed with various gap distances. The experimental results indicate that the maximum rotation angle is ± 51° at 37 Hz when the gap distance is 3 mm and the applied voltage is ± 5 V.



This work was partially supported by the National Research Foundation of Korea (NRF) Grant funded by the Korea government (Ministry of Science, ICT and Future Planning) (no. NRF-2017R1C1B5018324). This work was partially supported by Basic Science Research Program through  the National Research Foundation funded by the Ministry of Education (NRF-2017R1D1A1B03033321).


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Copyright information

© Springer-Verlag GmbH Germany, part of Springer Nature 2018

Authors and Affiliations

  1. 1.Department of Mechanical EngineeringHanbat National UniversityDaejeonKorea
  2. 2.School of Mechanical EngineeringChungnam National UniversityDaejeonKorea

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