Microsystem Technologies

, Volume 24, Issue 7, pp 3169–3178 | Cite as

Optimization of a MEMS variable capacitor with high linearity and large tuning ratio

  • Zhuhao GongEmail author
  • Huiliang Liu
  • Xin Guo
  • Zewen Liu
Technical Paper


A novel micro-electro-mechanical system variable capacitor with a nonplanar top plate and a side leverage electrode structure is proposed to achieve a large tuning ratio and excellent linearity. A theoretical analysis of the structure is performed, including both a mechanical analysis and an electrical analysis. The effects of the structural parameters on the linearity were analyzed and a design method was derived to optimize the linearity. A simulation using CoventorWare was carried out to verify the capacitor performance with particular emphasis on the capacitance versus voltage (CV) response. The results show a high linearity factor of 99.92% between 0.077 and 0.238 pF (the linear CV response range) that corresponds to a linear capacitance tuning ratio of 309%.


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Copyright information

© Springer-Verlag GmbH Germany, part of Springer Nature 2018

Authors and Affiliations

  1. 1.Institute of MicroelectronicsTsinghua UniversityBeijingPeople’s Republic of China
  2. 2.Tsinghua-Berkeley Shenzhen InstituteTsinghua UniversityShenzhenPeople’s Republic of China

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