Aiming at the problems of large volume and low yield of MEMS thermal reactor infrared detector at present, this paper designs a MEMS thermopile infrared detector based on two terminal beam structure. Through the analysis of the working principle of the thermopile infrared detector, discusses the structure and composition of materials and other parameters of the device influence on the detector performance, the detector layout design and fabrication processing. According to the test results of the infrared radiation test system, the results show the response and detection rate of the designed thermopile infrared detector are much higher than the reported one based on four end beam, with response rate of 1151.14 V/W, detection rate of 4.15 × 108 cm Hz1/2/W, and response time of 14.46 ms. It has a wide range of vacuum pressure response and high sensitivity to temperature response, and can be used as a vacuum sensor and a temperature sensor.
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CL, ZY and SS participated in structural design and the detail preparation and processing, experimental test and discussion. GH and ZZ collected relevant literature and writing the manuscript, CL checking and reading the manuscript.
Compliance with ethical standards
Conflict of interest
The authors declare no conflict of interest.
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