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Microsystem Technologies

, Volume 24, Issue 5, pp 2177–2187 | Cite as

Structure design and experimental investigation of a multi-function stylus profiling system for characterization of engineering surfaces at micro/nano scales

  • Jia Tian
  • Yanling Tian
  • Zhiyong Guo
  • Fujun Wang
  • Dawei Zhang
  • Xianping Liu
Technical Paper
  • 79 Downloads

Abstract

A novel multi-function stylus profiling system has been developed for characterizing surface properties at micro/nanometer scales. The multi-function stylus profiling system provides, within one set-up arrangement, measurements of topography, friction, Young’s modulus and hardness of a surface. The measurement is based on point-by-point scanning so that the four measured functions can be correlated in space and in time. It targets an area that is of growing importance to a wide range of technologies where function-orientated surfaces/coatings are in demand. The essential part of the multi-function stylus profiling system is a special sensing probe, which has an electromagnetic force actuator and three precision capacitive sensors for simultaneous measurements of surface height/deformation and friction force between the probe tip and the surface being scanned. The system provides a controllable loading force in a range of 0.05–20 mN. The topography measurement has a maximum range of 20 µm. The scanning area of 100 µm × 100 µm is closed-loop controlled with an accuracy of 1 nm. Design, analysis, and experimental investigation of the multi-function stylus profiling system are carried out. Evaluations are carried out on certain material surfaces to demonstrate the capability of the system.

Notes

Acknowledgements

This research is supported by National Natural Science Foundation of China (nos. 51675371, 51675367 51405333, 51420105007), EU H2020 MSCA RISE 2016 (no. 734174).

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Copyright information

© Springer-Verlag GmbH Germany, part of Springer Nature 2018

Authors and Affiliations

  • Jia Tian
    • 1
    • 2
  • Yanling Tian
    • 1
    • 3
  • Zhiyong Guo
    • 1
  • Fujun Wang
    • 1
  • Dawei Zhang
    • 1
  • Xianping Liu
    • 3
  1. 1.Key Laboratory of Mechanism Theory and Equipment Design of Ministry of Education, Tianjin UniversityTianjinChina
  2. 2.School of Mechanical EngineeringHebei University of TechnologyTianjinChina
  3. 3.School of EngineeringUniversity of WarwickCoventryUK

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