Experimental evaluation of resonant frequencies with associated mode shapes and power analysis of thermally actuated vibratory microgyroscope

  • Rana I. Shakoor
  • Marc Burnie
  • Sohail Iqbal
  • Yongjun lai
Technical Paper
  • 3 Downloads

Abstract

This paper presents theoretically and experimentally determined modal behavior of thermally actuated gyroscopic sensor. A comparative analysis is carried out between experimental and finite element analysis (FEA) results. FEA is performed on the model to predict the expected mode shapes and resonant frequencies of the gyroscopic sensors experimentally. Experimental evaluation of the resonant frequencies and associated mode shapes is carried out using PolyTec Micro System Analyzer by separate in-plane and out-of-plane tests that produced frequency response data. Frequency response data showed that resonant frequencies of drive and sense mode are closely matched around 6 kHz. The drive mode is characterized by applying constant as well as variable current whereas sense mode is evaluated at constant AC voltages both at their resonant frequencies i.e. 6 kHz. Maximum displacement of 3 and 0.12 μm is achieved by drive and sense mode respectively at 225 mArms and 40 Vac. Different mode shapes associated with the resonant frequencies are also experimentally characterized. A comprehensive performance analysis of thermally actuated gyroscope showed that drive mode displacement of 4.2 μm can be achieved by consuming 363.39 mW.

References

  1. IEEE standard specification format guide and test procedure for coriolis vibratory gyros (2004) IEEE Std 1431-2004, pp 1–78Google Scholar
  2. Acar C, Schofield AR, Trusov AA, Costlow LE, Shkel AM (2009) Environmentally robust MEMS vibratory gyroscopes for automotive applications. IEEE Sens J 9(12):1895–1906.  https://doi.org/10.1109/JSEN.2009.2026466 CrossRefGoogle Scholar
  3. Alper SE, Akin T (2004) Symmetrical and decoupled nickel microgyroscope on insulating substrate. Sens Actuators A Phys (SPEC ISS) 115(2–3):336–350.  https://doi.org/10.1016/j.sna.2004.04.041 CrossRefGoogle Scholar
  4. Alper SE, Akin Tayfun (2005) A single-crystal silicon symmetrical and decoupled MEMS gyroscope on an insulating substrate. J Microelectromech Syst 14(4):707–717.  https://doi.org/10.1109/JMEMS.2005.845400 CrossRefGoogle Scholar
  5. Barnaby RE, Chatterton JB, Gerring FH (1953) General theory and operational characteristics of gyrotron angular rate tachometer. Aeronaut Eng Rev 12(11):31–36Google Scholar
  6. Bell DJ, Lu TJ, Fleck NA, Spearing SM (2005) MEMS actuators and sensors: observation on their performance and selection for purpose. J Micromech Microeng 15:53–64CrossRefGoogle Scholar
  7. Casinovi G, Norouzpour-Shirazi A, Dalal M, Ayazi F (2016) Gyroscope sensing and self-calibration architecture based on signal phase shift. Sens Actuators A 241:1–11.  https://doi.org/10.1016/j.sna.2016.01.045 CrossRefGoogle Scholar
  8. Chen CH, Yeh JA, Wang PJ (2006) Electrical breakdown phenomena for devices with micron separations. J Micromech Microeng 16:1366–1373CrossRefGoogle Scholar
  9. Damrongsak B, Kraft M (2005) A micromachined electrostatically suspended gyroscope with digital force feedback. IEEE Sens (IEEE).  https://doi.org/10.1109/ICSENS.2005.1597720 Google Scholar
  10. Greiff P, Boxenhorn B, King T, Niles L (1991) Silicon monolithic micromechanical gyroscope. In: 6th international conference solid-state sensors and actuators (Transducers ’91), San Francisco, pp 966–68Google Scholar
  11. Hickey R, Sameoto D, Hubbard T, Kujath M (2003) Time and frequency response of two-arm micromachined thermal actuator. J Micromech Microeng 13:40–46CrossRefGoogle Scholar
  12. Lai Y, McDonald J, Kujath M, Hubbard T (2004) Force, deflection and power measurement of toggled microthermal actuators. J Micromech Microeng 14:49–56CrossRefGoogle Scholar
  13. Ma W, Lin Y, Zheng X, Liu Y, Jin Z (2016) A novel triangular-electrode based capacitive sensing method for MEMS resonant devices. Sens Actuators A 252:233–241.  https://doi.org/10.1016/j.sna.2016.10.016 CrossRefGoogle Scholar
  14. Madni AM, Costlow LE, Knowles SJ (2003) Common design techniques for BEI GyroChip quartz rate sensors for both automotive and aerospace/defense markets. IEEE Sens J 3(5):569–578.  https://doi.org/10.1109/JSEN.2003.817728 CrossRefGoogle Scholar
  15. Nakamura S (2005) MEMS inertial sensor toward higher accuracy & amp; multi-axis sensing. IEEE Sens (IEEE).  https://doi.org/10.1109/ICSENS.2005.1597855 Google Scholar
  16. Neul R, Gmez U-M, Kehr K, Bauer W, Classen J, Dring C, Esch E et al (2007) Micromachined angular rate sensors for automotive applications. IEEE Sens J 7(2):302–309.  https://doi.org/10.1109/JSEN.2006.888610 CrossRefGoogle Scholar
  17. Pan Y, Tianliang Q, Wang D, Suyong W, Liu J, Tan Z, Yang K, Luo H (2017) Observation and analysis of the quality factor variation behavior in a monolithic fused silica cylindrical resonator. Sens Actuators A 260:81–89.  https://doi.org/10.1016/j.sna.2017.03.041 CrossRefGoogle Scholar
  18. Pappas IPI, Keller T, Mangold S, Popovic M, Dietz V, Morari M (2004) A reliable gyroscope-based gait-phase detection sensor embedded in a shoe insole. IEEE Sens J 4(2):268–274.  https://doi.org/10.1109/JSEN.2004.823671 CrossRefGoogle Scholar
  19. Qu H, Fang D, Sadat A, Yuan P, Xie H (2004) High-resolution integrated micro-gyroscope for space applications, 41st Space Congress, Cape Canaveral, Florida, USA, 27–30 April 2004Google Scholar
  20. Rozelle D (2009) The hemispherical resonator gyro: from wineglass to the planets. In: 19th AAS/AIAA space flight mechanics, pp 1157–78Google Scholar
  21. Shkel AM (2006) Type I and type II micromachined vibratory gyroscopes. IEEE/ION Position Location Navig Sympos (IEEE).  https://doi.org/10.1109/PLANS.2006.1650648 Google Scholar
  22. Trusov AA, Schofield AR, Shkel AM (2011) Micromachined rate gyroscope architecture with ultra-high quality factor and improved mode ordering. Sens Actuators A 165(1):26–34.  https://doi.org/10.1016/j.sna.2010.01.007 CrossRefGoogle Scholar
  23. Tsai N-C, Sue C-Y (2010) Experimental analysis and characterization of electrostatic-drive tri-axis micro-gyroscope. Sens Actuators A 158(2):231–239.  https://doi.org/10.1016/j.sna.2010.01.005 CrossRefGoogle Scholar
  24. Zaman MF, Sharma A, Hao Zhili, Ayazi F (2008) A mode-matched silicon-yaw tuning-fork gyroscope with subdegree-per-hour Allan deviation bias instability. J Microelectromech Syst 17(6):1526–1536.  https://doi.org/10.1109/JMEMS.2008.2004794 CrossRefGoogle Scholar
  25. Zhao C, Montaseri MH, Wood GS, Pu SH, Seshia AA, Kraft M (2016) A review on coupled MEMS resonators for sensing applications utilizing mode localization. Sens Actuators A 249:93–111.  https://doi.org/10.1016/j.sna.2016.07.015 CrossRefGoogle Scholar

Copyright information

© Springer-Verlag GmbH Germany, part of Springer Nature 2018

Authors and Affiliations

  • Rana I. Shakoor
    • 1
  • Marc Burnie
    • 2
  • Sohail Iqbal
    • 3
  • Yongjun lai
    • 2
  1. 1.Department of Mechatronics EngineeringAir UniversityIslamabadPakistan
  2. 2.Department of Mechanical and Materials EngineeringQueens UniversityKingstonCanada
  3. 3.Department of Mechanical and Aerospace EngineeringAir UniversityIslamabadPakistan

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