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Carrier concentration of calcium zinc oxide with different calcium contents deposited through spray pyrolysis

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Abstract

Calcium zinc oxide (CaZnO) films were prepared via spray pyrolysis deposition at 300 °C with zinc acetate and calcium acetate precursors of various calcium/zinc atomic ratios (CZ) in an aqueous solution. The surface morphology and crystalline structure of the samples were analyzed via scanning electron microscopy and X-ray diffraction. The size of the film grain increased with the CZ parameter, and the films exhibited a zinc oxide structure with preferred (101) orientations. The Ca content and the optical bandgap increased with the CZ parameter as well. Hall measurements were carried out to determine the carrier concentration and mobility. All films showed n-type conduction, with concentrations ranging from 1.7 × 1016 to 8.7 × 1016 cm−3 for the unintentionally doped CaZnO films. The concentration showed an increasing—flat behavior, and the mobility showed flat—decreasing behavior with an increase in the CZ parameter. Different deep-level states were identified by analyzing the photoluminescence, and these states dominate the carrier concentration of the CaZnO films prepared via spray pyrolysis.

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Acknowledgements

This research was supported by the Ministry of Science and Technology, Taiwan (MOST 104-2221-E-390-011-MY2, MOST 106-2221-E-390-012-), National Chung Shan Institute of Science and Technology, R.O.C. (NCSIST-103-V304(106)), and the NSYSU-NUK Joint Research Project (#NSYSUNUK, 106-I003).

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Authors and Affiliations

  1. Department of Electrical Engineering, National University of Kaohsiung, Kaohsiung, 81148, Taiwan

    Yi-Fu Lu, Wen-How Lan, Ming-Chang Shih, Hsin-Hui Kuo & David Jui-Yang Feng

  2. Department of Electronic Engineering, Minghsin University of Science and Technology, Hsinchu, 30401, Taiwan

    Mu-Chun Wang

  3. Department of Photonics, National Sun Yat-sen University, Kaohsiung, 80424, Taiwan

    Yi-Jen Chiu & Yung-Jr Hung

  4. Department of Chemical and Materials Engineering, National University of Kaohsiung, Kaohsiung, 81148, Taiwan

    Cheng-Fu Yang

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  1. Yi-Fu Lu
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Correspondence to Wen-How Lan or Mu-Chun Wang.

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Lu, YF., Lan, WH., Wang, MC. et al. Carrier concentration of calcium zinc oxide with different calcium contents deposited through spray pyrolysis. Microsyst Technol 24, 4267–4272 (2018). https://doi.org/10.1007/s00542-018-3749-x

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