Microsystem Technologies

, Volume 24, Issue 5, pp 2325–2331 | Cite as

Fabricated polycarbonate microchannel with different films using CO2 laser beam of two-pass for microfluidic chip

  • Zengliang Hu
  • Xueye Chen
  • Zhen Yao
  • Xiaodong Chen
  • Baoding Fu
  • Lei Zhang
Technical Paper


This paper demonstrates a novel and low-cost method for fabricating microchannel on polycarbonate (PC) sheet using CO2 laser. In the work, many microchannels are processed by CO2 laser beam of two-pass. Three sheets with different films are researched for increasing the cleanliness of PC sheet surface after CO2 laser processing. The experimental results show the surface of PC sheet with transparent wallpaper is most clear, but it has very large influence on width and depth of microchannel. In the next experiment, Taguchi method is used for optimizing CO2 laser processing parameters for decreasing the deviation of width and depth of microchannel. In the study, smaller-the-better signal-to-noise ratio is calculated. The result shows laser power is maximum influence factor and microchannel length is minimum influence factor on the deviation of width and depth of microchannel. The optimal processing parameters are laser power of 8 W, laser moving velocity of 15 mm/s and microchannel length of 100 mm. A verified experiment is preformed using the optimal processing parameters.



This work was supported by National Natural Science Foundation of China (51405214), The Key Project of Department of Education of Liaoning Province (JZL201715401).


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Copyright information

© Springer-Verlag GmbH Germany, part of Springer Nature 2017

Authors and Affiliations

  • Zengliang Hu
    • 1
  • Xueye Chen
    • 1
  • Zhen Yao
    • 1
  • Xiaodong Chen
    • 1
  • Baoding Fu
    • 1
  • Lei Zhang
    • 1
  1. 1.Faulty of Mechanical Engineer and AutomationLiaoning University of TechnologyJinzhouChina

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