Microsystem Technologies

, Volume 24, Issue 5, pp 2287–2294 | Cite as

Electrodeposition of Si–DLC nanocomposite film and its electronic application

  • Necati Basman
  • Rukiye Uzun
  • Ebru Gocer
  • Emin Bacaksiz
  • Ugur Kolemen
Technical Paper


In this study, a silicon doped diamond-like carbon (DLC) nanocomposite film was deposited electrochemically and it was used to fabricate an Ag/Si–DLC/p-Si metal–interlayer–semiconductor (MIS) Schottky diode. Methanol (CH3OH) was used as carbon and tetraethoxysilane (Si(OC2H5)4) as Si source, respectively. Morphology of the film was observed by scanning electron microscopy and continuous surface with numerous lumps spread randomly was observed. Structural and chemical composition analyses of the film were carried out by Raman and X-ray photoelectron spectroscopy. Typical D and G bands of DLC films were not observed in the Raman spectrum due to abundance of Si–C bonds. Silicon incorporation promoted the film deposition and increased sp3 bonds in the film. Current–Voltage (IV) measurement was conducted to obtain parameters of the MIS diode. The diode exhibited a good rectifier behavior with ~ 103 rectification ratio. In the forward bias semi-logarithmic IV plot, two linear regions with different slopes were observed. Such behavior was modelled by two parallel diodes and attributed to different conduction mechanism. The main electrical parameters, such as barrier height, ideality factor and series resistance were calculated by IV and Cheung–Cheung methods. The Si–DLC nanocomposite film acted as barrier height modifier in the MIS diode.



This work was supported by the Scientific Research Project Committee of Gaziosmanpasa University (under the Grand contract no: 2015/88).


  1. Abd HR, Al-Douri Y, Ahmed NM, Hashim U (2013) Alternative-current electrochemical etching of uniform porous silicon for photodetector applications. Int J Electrochem Sci 8:11461–11473Google Scholar
  2. Ahmed SF, Moon MW, Lee KR (2009) Effect of silver doping on optical property of diamond like carbon films. Thin Solid Films 517:4035–4038CrossRefGoogle Scholar
  3. Al-Douri Y, Ameri M, Bouhemadou A, Khenata R (2016) Annealing temperature effect on structural, optical, morphological and electrical properties of CdS/Si(100) nanostructures. Microsyst Technol 22(10):2529–2541CrossRefGoogle Scholar
  4. Alialy S, Tecimer H, Uslu H, Altındal S (2013) A comparative study on electrical characteristics of Au/N-Si Schottky diodes, with and without bi-doped pva interfacial layer in dark and under illumination at room temperature. J Nanomed Nanotechol 4(3):1000167Google Scholar
  5. Aydogan S, Saglam M, Turut A, Onganer Y (2009) Series resistance determination of Au/polypyrrole/p-Si/Al structure by current–voltage measurements at low temperatures. Mater Sci Eng C 29(4):1486–1490CrossRefGoogle Scholar
  6. Basman N, Uzun O, Fiat S, Alkan C, Cankaya G (2012) Electrical characterization of a pre-ceramic polymer modified Ag/poly(hydridocarbyne)/p-Si Schottky barrier diode. J Mater Sci Mater Electron 23(12):2282–2288CrossRefGoogle Scholar
  7. Basman N, Aslan N, Uzun O, Cankaya G, Kolemen U (2015) Electrical characterization of metal/diamond-like carbon/inorganic semiconductor MIS Schottky barrier diodes. Microelectron Eng 140:18–22CrossRefGoogle Scholar
  8. Basman N, Uzun R, Ozcakır R, Erol I, Cankaya G, Uzun O (2016) Effect of a new methacrylic monomer on diode parameters of Ag/p-Si Schottky contact. J Microelectron Electron Compon Mater 46:190–196Google Scholar
  9. Bhattacharyya S, Silva SRP (2007) Demonstration of an amorphous carbon tunnel diode. Appl Phys Lett 90(8):082105CrossRefGoogle Scholar
  10. Bianconi PA, Joray SJ, Aldrich BL, Sumranjit J, Duffy DJ, Long DP, Lazorcik JL, Raboin L, Kearns JK, Smulligan SL, Babyak JM (2004) Diamond and diamond-like carbon from a preceramic polymer. J Am Chem Soc 126(10):3191–3202CrossRefGoogle Scholar
  11. Caschera D, Federici F, Pandolfi L, Kaciulis S, Sebastiani M, Bemporad E, Padeletti G (2011) Effect of composition on mechanical behaviour of diamond-like carbon coatings modified with titanium. Thin Solid Films 519:3061–3067CrossRefGoogle Scholar
  12. Chaus AS, Fedosenko TN, Rogachev AV, Čaplovič Ľ (2014) Surface, microstructure and optical properties of copper-doped diamond-like carbon coating deposited in pulsed cathodic arc plasma. Diam Relat Mater 42:64–70CrossRefGoogle Scholar
  13. Cheung SK, Cheung NW (1986) Extraction of Schottky diode parameters from forward current–voltage characteristics. Appl Phys Lett 49(2):85–87CrossRefGoogle Scholar
  14. Choi J, Kawaguchi M, Kato T, Ikeyama M (2007) Deposition of Si–DLC film and its microstructural, tribological and corrosion properties. Microsyst Technol 13:1353–1358CrossRefGoogle Scholar
  15. Demirezen S, Altındal S, Uslu I (2013) Two diodes model and illumination effect on the forward and reverse bias I–V and C–V characteristics of Au/PVA (bi-doped)/n-Si photodiode at room temperature. Curr Appl Phys 13:53–59CrossRefGoogle Scholar
  16. Erdemir A, Donnet C (2006) Tribology of diamond-like carbon films: recent progress and future prospects. J Phys D Appl Phys 39(18):311–327CrossRefGoogle Scholar
  17. Ferrari AC (2002) Determination of bonding in diamond-like carbon by Raman spectrocopy. Diam Relat Mater 11:1053–1061CrossRefGoogle Scholar
  18. Franta D, Ohlidal I, Bursikova V, Zajickova L (2003) Optical properties of diamond-like carbon films containing SiOx. Diam Relat Mater 12:1532–1538CrossRefGoogle Scholar
  19. Gao X, Xue Q, Hao L, Zheng Q, Li Q (2007) Ammonia sensitivity of amorphous carbon film/silicon heterojunctions. Appl Phys Lett 91(12):122110CrossRefGoogle Scholar
  20. Guerino M, Massi M, Maciel HS, Otani C, Mansano RD (2003) The effects of the nitrogen on the electrical and structural properties of the diamond-like carbon (DLC) films. Microelectron J 34:639–641CrossRefGoogle Scholar
  21. Gullu O, Turut A (2009) Electrical analysis of organic interlayer based metal/interlayer/semiconductor diode structures. J Appl Phys 106(10):103717CrossRefGoogle Scholar
  22. Gullu O, Turut A (2010) Electrical analysis of organic dye-based MIS Schottky contacts. Microelectron Eng 87(12):2482–2487CrossRefGoogle Scholar
  23. Gupta RK, Ghosh K, Kahol PK (2010) Current-voltage characteristics of p-Si/carbon junctions fabricated by pulsed laser deposition. Microelectron Eng 87(2):221–224CrossRefGoogle Scholar
  24. Huang L, Jiang H, Zhang J, Zhang Z, Zhang P (2006) Synthesis of copper nanoparticles containing diamond-like carbon films by electrochemical method. Electrochem Commun 8:262–266CrossRefGoogle Scholar
  25. Ibraheam AS, Al-Douri Y, Al-Fhdawi JMS, Al-Jumaili HS, Verma KD, Hashim U, Ayub RM, Ruslinda AR, Md Arshad MK, Reshak AH, Abd Hamid SB (2016) Structural, optical and electrical properties of Cu2Zn1−xCdxSnS4 quinternary alloys Nanostructures deposited on porous silicon. Microsyst Technol 22:2893–2900CrossRefGoogle Scholar
  26. Ibraheam AS, Al-Douri Y, Hashim U, Ameri M, Bouhemadou A, Khenata R (2017) Structural, optical and electrical investigations of Cu2Zn1−xCdxSnS4/Si quinternary alloy nanostructures synthesized by spin coating technique. Microsyst Technol 23(6):2223–2232CrossRefGoogle Scholar
  27. Katsuno T, Godet C, Loir AS, Garrélie F (2006) Hopping current density in amorphous carbon/crystalline silicon heterojunctions. J Noncryst Solids 352:1421–1424CrossRefGoogle Scholar
  28. Kima HG, Ahna SH, Kima JG, Parkb SJ, Lee KR (2005) Effect of Si-incorporation on wear-corrosion properties of diamond-like carbon films. Thin Solid Films 482:299–304CrossRefGoogle Scholar
  29. Laurikaitienė J, Meškinis Š, Adlienė D, Šablinskas V, Tamulevičius S, Kopustinskas V, Šniurevičiūtė M, Mockevičienė S, Gudaitis R (2008) Electrical properties of the diamond like carbon films irradiated with high energy photons. J Phys Conf Ser 100:072036CrossRefGoogle Scholar
  30. Li RS, Liu B, Zhou M, Zhang ZX, Wang T, Lu BA, Xie EQ (2009) Effect of deposition voltage on the field emission properties of electrodeposited diamond-like carbon films. Appl Surf Sci 255(9):4754–4757CrossRefGoogle Scholar
  31. Meškinis Š, Vasiliauskas A, Šlapikas K, Gudaitis R, Andrulevičius M, Čiegis A, Niaura G, Kondrotas R, Tamulevičius S (2014) Bias effects on structure and piezoresistive properties of DLC: Ag thin films. Surf Coat Technol 255:84–89CrossRefGoogle Scholar
  32. Milne WI (2003) Electronic devices from diamond-like carbon. Semicond Sci Technol 18:81–85CrossRefGoogle Scholar
  33. Monch W (1999) Barrier heights of real Schottky contacts explained by metal-induced gap states and lateral inhomogeneities. J Vac Sci Technol B 17(4):1867CrossRefGoogle Scholar
  34. Nery RPOS, Bonelli RS, Camargo SS Jr (2010) Evaluation of corrosion resistance of diamond-like carbon films deposited onto AISI 4340 steel. J Mater Sci 45(20):5472–5477CrossRefGoogle Scholar
  35. Omar K, Al-Douri Y, Ramizy A, Hassan Z (2011) Stiffness properties of porous silicon nanowires fabricated by electrochemical and laser-induced etching. Superlattices Microstruct 50:119–127CrossRefGoogle Scholar
  36. Papakonstantinou P, Zhao JF, Lemoine P, McAdams ET, McLaughlin JA (2002) The effects of Si incorporation on the electrochemical and nanomechanical properties of DLC thin films. Diam Relat Mater 11:1074–1080CrossRefGoogle Scholar
  37. Ramizy A, Hassan Z, Omar K, Al-Douri Y, Mahdi MA (2011) New optical features to enhance solar cell performance based on porous silicon surfaces. Appl Surf Sci 257:6112–6117CrossRefGoogle Scholar
  38. Robertson J (2002) Diamond-like carbon. Mater Sci Eng R 37:129–281CrossRefGoogle Scholar
  39. Silva SRP, Amaratunga GAJ, Okano K (1999) Modeling of the electron field emission process in polycrystalline diamond and diamond-like carbon thin films. J Vac Sci Technol B 17(2):557–561CrossRefGoogle Scholar
  40. Singh S, Dillip GR, Vyas S, Hasan MdR, Park IK, Chakrabarti P, Park SH (2017) Fabrication and characterization of hydrothermally grown MgZnO nanorod films for Schottky diode applications. Microsyst Technol 23(1):39–46CrossRefGoogle Scholar
  41. Staryga E, Bak GW (2005) Relation between physical structure and electrical properties of diamond-like carbon thin films. Diam Relat Mater 14:23–34CrossRefGoogle Scholar
  42. Sze SM (1981) Physics of semiconductor devices, 2nd edn. Wiley, New YorkGoogle Scholar
  43. Tao Y, Yi D, Zhu B, Wang D, Wang Z, He K (2011) Direct hydrothermal electrochemical preparation of diamond-like carbon films on substrates. J Mater Sci 46(4):1136–1138CrossRefGoogle Scholar
  44. Wan S, Wang L, Xue Q (2010) Electrochemical deposition of sulfur doped DLC nanocomposite film at atmospheric pressure. Electrochem Commun 12(1):61–65CrossRefGoogle Scholar
  45. Wang FM, Chen MW, Lai QB (2010) Metallic contacts to nitrogen and boron doped diamond-like carbon films. Thin Solid Films 518(12):3332–3336CrossRefGoogle Scholar
  46. Yan X, Xu T, Chen G, Liu HW, Yang SR (2004a) Effect of deposition voltage on the microstructure of electrochemically deposited hydrogenated amorphous carbon films. Carbon 42(15):3103–3108CrossRefGoogle Scholar
  47. Yan X, Xu T, Chen G, Xue Q, Yang S (2004b) Synthesis of diamond-like carbon/nanosilica composite films by an electrochemical method. Electrochem Commun 6:1159–1162CrossRefGoogle Scholar
  48. Yan X, Xu T, Chen G, Yang S, Liu H (2004c) Study of structure, tribological properties and growth mechanism of DLC and nitrogen-doped DLC films deposited by electrochemical technique. Appl Surf Sci 236:328–335CrossRefGoogle Scholar
  49. Yi JW, Kim JK, Moon MW, Lee KR, Kim SS (2009) Tribological performance of alternating-layered Si–DLC/DLC films under humid conditions. Tribol Lett 34:223–228CrossRefGoogle Scholar
  50. Zeng A, Neto VF, Gracio JJ, Fan QH (2014) Diamond-like carbon (DLC) films as electrochemical electrodes. Diam Relat Mater 43:12–22CrossRefGoogle Scholar
  51. Zhang J, Huang L, Yu L, Zhang P (2008) Synthesis and tribological behaviors of diamond-like carbon films by electrodeposition from solution of acetonitrile and water. Appl Surf Sci 254(13):3896–3901CrossRefGoogle Scholar

Copyright information

© Springer-Verlag GmbH Germany, part of Springer Nature 2017

Authors and Affiliations

  1. 1.Department of Electrical and Electronics EngineeringBulent Ecevit UniversityZonguldakTurkey
  2. 2.Department of PhysicsGaziosmanpasa UniversityTokatTurkey
  3. 3.Deparment of PhysicsKaradeniz Technical UniversityTrabzonTurkey

Personalised recommendations