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Power density optimization for MEMS piezoelectric micro power generator below 100 Hz applications

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Abstract

In piezoelectric based micro-power generator (PMPG), electrical energy is generated from mechanical vibration by gaining on the piezoelectric effects. This study concentrates on optimization of the output power density of PMPG at an extremely low frequency (ELF) range below 100 Hz. Taguchi method with eight control parameters and signal-to-noise ratios are utilized in design optimization, COMSOL Multiphysics ver. 4.2 was used for PMPG simulation at optimized parameter. Both Taguchi and S/N ratio analyses show that piezoelectric material selected and its dimensions have the most influence on the generated electric energy density. The simulated PMPG resulting output root mean square voltage was 2.47 V, and power density was 0.376 W/cm3. The PMPG design was fabricated with MEMS technology producing 0.29 W/cm3 power density and supplying 2.19 V DC to the final load. The modeling, simulation and fabricated design show that the PMPG is capable of replacing traditional Lithium Iodide (Li-Ion) batteries powering small electronic gadgets, such as biomedical implant and wearable electronics in frequency range of 25–27 Hz.

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Acknowledgements

The authors would like to thank the Ministry of Higher Education Malaysia (MoHE) for supporting this project under Grant HiCoE UKM MEMS for Artificial Kidney (AKU-95), and University Kebangsaan Malaysia under Grant UKM-GUP-2011-380.

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Authors and Affiliations

  1. Institute of Microengineering and Nanoelectronics (IMEN), Universiti Kebangsaan Malaysia, 43600, Bangi, Selangor, Malaysia

    Azrul Azlan Hamzah & Burhanuddin Yeop Majlis

  2. Electrical Engineering Department, Engineering Faculty, Alhussein Bin Talal University, Ma’an, Jordan

    Mohd H. S. Alrashdan

Authors
  1. Mohd H. S. Alrashdan
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  2. Azrul Azlan Hamzah
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  3. Burhanuddin Yeop Majlis
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Correspondence to Azrul Azlan Hamzah.

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Alrashdan, M.H.S., Hamzah, A.A. & Majlis, B.Y. Power density optimization for MEMS piezoelectric micro power generator below 100 Hz applications. Microsyst Technol 24, 2071–2084 (2018). https://doi.org/10.1007/s00542-017-3608-1

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  • DOI: https://doi.org/10.1007/s00542-017-3608-1

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