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Design and optimization of DETF resonator based on uncertainty analysis in a micro-accelerometer

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Abstract

Boundary structure and geometry parameters of the Double-Ended-Tuning Fork (DETF) resonator in a micro-accelerometer are investigated. The theoretical vibration model of a DETF resonator is established and verified by the simulation results obtained by finite element method. Uncertainty analysis incorporating the parametric uncertainty distribution is conducted by establishing the sample-based stochastic model to systematically investigate the influence of different geometry parameters of the DETF resonator on the natural frequency and the sensitivity of DETF resonator. The results reveal the different influences of geometry parameters, which can be used as reference for design and optimization of the DETF resonator of the micro-accelerometer.

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Acknowledgements

This study was supported by the Fundamental Research Funds for the Central Universities under grants number YZ620, Postdoctoral Science Foundation of China under Grants number 2016M591049.

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Authors and Affiliations

  1. College of Information Science and Technology, Beijing University of Chemical Technology, Beijing, 100029, China

    Huichao Shi

  2. School of Instrument Science and Opto-electronics Engineering, Beihang University, Beijing, 100191, China

    Shangchun Fan

  3. North Automatic Control Technology Research Institute, Taiyuan, 003003, China

    Wenlong Li

Authors
  1. Huichao Shi
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  2. Shangchun Fan
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  3. Wenlong Li
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Correspondence to Huichao Shi.

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Shi, H., Fan, S. & Li, W. Design and optimization of DETF resonator based on uncertainty analysis in a micro-accelerometer. Microsyst Technol 24, 2025–2034 (2018). https://doi.org/10.1007/s00542-017-3599-y

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