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A simple method for shape modulation in microlens array fabrication via spin-coating process

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Abstract

In this paper, a simple method for microlens array (MLA) fabrication is presented by the modulation of spin-coating process. Firstly, micro holes with design diameters were prepared on substrate through maskless lithography based on the digital micromirror device. Next by the spin-coating of photoresist onto the substrate the meniscus concave microlens with various curvatures can be formed, and then become stable after a proper baking process. During the coating process, the photoresist was strictly confined in the micro holes and its volume could be precisely controlled by adjusting the spin-coating speed. These advantages make it very easy to obtain microlenses with different aspect ratios at precisely pre-defined diameters. Experimental results showed the effectiveness of our method. The presented method is expected to provide a novel, economic and simple strategy for shape modulation in MLA fabrication.

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Acknowledgements

This work is supported by funding from the Chinese National Natural Science Foundation (Grant no. 51475442), and partially carried out at the University of Science and Technology of China Center for Micro and Nanoscale Research and Fabrication.

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Author notes

  1. Shengzhou Huang and Mujun Li are contributed equally to this work.

Authors and Affiliations

  1. Department of Precision Machinery and Precision Instrumentation, University of Science and Technology of China, No. 96, JinZhai Road, Baohe District, Hefei, 230026, Anhui, People’s Republic of China

    Shengzhou Huang, Mujun Li, Lianguan Shen, Jinfeng Qiu & Youquan Zhou

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  1. Shengzhou Huang
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  2. Mujun Li
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  3. Lianguan Shen
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  4. Jinfeng Qiu
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  5. Youquan Zhou
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Corresponding author

Correspondence to Mujun Li.

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Funding

This study was funded by the Chinese National Natural Science Foundation (Grant no. 51475442).

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The authors declare that they have no conflict of interest.

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Huang, S., Li, M., Shen, L. et al. A simple method for shape modulation in microlens array fabrication via spin-coating process. Microsyst Technol 24, 1885–1889 (2018). https://doi.org/10.1007/s00542-017-3571-x

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  • DOI: https://doi.org/10.1007/s00542-017-3571-x

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