Abstract
Fluid-conveying microelectromechanical systems (MEMS) are indispensable components of many sensors/actuators used in many systems ranging from resonators to atomic force microscopy. Due to their low cost, minimal power consumption, and uncomplicated architecture, electrostatically-actuated fluid-conveying microbeams have become a popular choice of MEMS in many industries. In this work, the dynamic behavior and pull-in instability of fluid-conveying micro-bridges and micro-cantilevers are modeled and validated. The microbeams are actuated through application of abrupt electrostatic forces. The equation of motion is derived with respect to a non-uniform profile for the fluid flow and nonlinear electrostatic actuation. The developed model is then implemented into a nonlinear finite-element model. Equation of motion is solved by employing Newmark’s time discretization method. The static pull-in behavior is investigated to validate the model. The static pull-in results are then compared and validated with different results in literature. The dynamic pull-in behavior of the aforementioned systems is examined through a parameter study on the applied voltage, fluid flow velocity, midplane stretching, and axial force. The results of this study are applicable in design and modeling of MEMS in sensing and resonators applications.
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06 September 2017
An erratum to this article has been published.
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Acknowledgements
The authors would like to acknowledge the Iranian National Science Foundations (INSF) for their support.
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An erratum to this article is available at https://doi.org/10.1007/s00542-017-3543-1.
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Lotfi, M., Moghimi Zand, M., Isaac Hosseini, I. et al. Transient behavior and dynamic pull-in instability of electrostatically-actuated fluid-conveying microbeams. Microsyst Technol 23, 6015–6023 (2017). https://doi.org/10.1007/s00542-017-3503-9
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DOI: https://doi.org/10.1007/s00542-017-3503-9