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Influence of deposition temperature during LPCVD on surface properties of ultrathin polysilicon films

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Abstract

The selection of the proper materials for the fabrication of the micro electro mechanical systems (MEMS) is a very important issue in the MEMS research. The materials should be adequate for the fabrication process as well as they have to demonstrate in particular good adhesive (to avoid stiction between contacting/sliding components) and frictional/tribological properties. We fabricated ultrathin (50 nm thick) polysilicon films on single crystal silicon wafers at various deposition process conditions and observed the effect of the process parameters on surface topography and adhesive as well as frictional properties of the produced films. The atomic force microscope was used in these studies equipped with special cantilevers. We identified interesting correlations between the process parameters and adhesive/frictional properties of the studied films which enable to optimize the process to decrease adhesion (stiction) and friction between sliding components of MEMS devices and compared them to previous research done at samples with thicker layer. Topography of both samples and cantilevers has been studied in depth to allow later simulation of the interface. Additional measurements of friction in various humidites should be done next in order to assess the influence of its impact on friction coefficient. Further comparison of adhesion to friction in particular environmental properties might also increase our understanding of MEMS surface interactions.

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References

  • Achanta S, Celis JP (2015) Nanotribology of MEMS/NEMS. In: Gnecco E, Meyer E (eds) Fundamentals of friction and wear on the nanoscale. NanoScience and technology. Springer, Cham

    Google Scholar 

  • Brand O (2005) Fabrication technology. In: Brand O, Fedder GK (eds) CMOS - MEMS. Wiley-VCH Verlag GmbH, Weinheim, Germany

    Chapter  Google Scholar 

  • Hartzell AL, da Silva MG, Shea H (2011) MEMS reliability. Springer, Berlin

    Book  Google Scholar 

  • Jarzabek D, Rymuza Z, Ohmae N (2009) Friction and adhesion of carbon nanotube brushes. Int J Mater Res 100:973–977

    Article  Google Scholar 

  • Jarzabek D, Kaufmann A, Schift A, Rymuza Z, Jung T (2014) Elastic modulus and fracture strength evaluation on the nanoscale by scanning force microscope experiments. Nanotechnology 25:21

    Article  Google Scholar 

  • Madou MJ (2012) Fundamentals of microfabrication and nanotechnology, vol I–III, 3rd edn. CRC Press, Boca Raton

    Google Scholar 

  • Rabinowicz E (1995) Friction and wear of materials, 2nd edn. Wiley, New York, p 315

    Google Scholar 

  • Sinha SK, Sujeet K, Satyanarayana N, Lim SC (eds) (2013) Nano-tribology and materials in MEMS. Springer, Berlin

    Google Scholar 

  • Voicu R, Michalowski M, Rymuza Z, Gavrila R, Obreja C, Müller R, Baracu A (2014) Design and analysis of polysilicon thin layers and MEMS vibrating structures. In: Proceedings DTIP 2014—SYMPOSIUM on design, test, integration and packaging of MEMS/MOEMS, Cannes Côte d’Azur, France, pp 129–133

  • Voicu R, Baracu A, Gavrila R, Obreja C, Danila M, Dinescu A, Bita B, Müller R (2015) Material characterizations for MEMS vibration sensors and biostructures applications. Dig J Nanomater Biostruct 10(3):1077–1085

    Google Scholar 

  • Yang S, Zhao Y, Jiang Z, Liu Y, Tian B (2013) A micro-force sensor with slotted-quad-beam structure for measuring the friction in MEMS bearings. Sensors 13(10):13178–13191

    Article  Google Scholar 

  • Zhang W, Meng G, Li H (2005) Electrostatic micromotor and its reliability. J Microelectron Reliab 45(7–8):1230–1242

    Article  Google Scholar 

Download references

Acknowledgements

The fabrication of the films carried out by the authors from IMT has been also supported by the Sectoral Operational Programme Human Resources Development 2007–2013 of the Ministry of European Funds through the Financial Agreement POSDRU/159/1.5/S/132397 and by the Romanian Contract Nucleu No. 15N/2016 TEHNOSPEC (TEHNOlogii generice esenţiale pentru prioritaţi ale SPECializarii inteligente).

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Authors and Affiliations

  1. Faculty of Mechatronics, Institute of Micromechanics and Photonics, Warsaw University of Technology, Warsaw, Poland

    Marcin Michałowski & Zygmunt Rymuza

  2. National Institute for Research and Development in Microtechnologies (IMT Bucharest), Bucharest, Romania

    Rodica Voicu, Cosmin Obreja, Angela Baracu & Raluca Muller

  3. University Politehnica of Bucharest, Bucharest, Romania

    Angela Baracu

Authors
  1. Marcin Michałowski
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  2. Rodica Voicu
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  3. Cosmin Obreja
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  4. Angela Baracu
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  5. Raluca Muller
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  6. Zygmunt Rymuza
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Correspondence to Marcin Michałowski.

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Michałowski, M., Voicu, R., Obreja, C. et al. Influence of deposition temperature during LPCVD on surface properties of ultrathin polysilicon films. Microsyst Technol 24, 537–542 (2018). https://doi.org/10.1007/s00542-017-3501-y

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  • DOI: https://doi.org/10.1007/s00542-017-3501-y

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