1 Erratum to: Microsyst Technol DOI 10.1007/s00542-016-3031-z

Unfortunately, author names were included twice in the original online publication of this article.

The correct author names are given here. The original article was corrected.

Byung‑Phil Mun, Chang‑Ju Park, Jae‑Kwon Lee, Kyoungsook Park, Jong‑Hyun Lee