Microsystem Technologies

, Volume 23, Issue 8, pp 3271–3280 | Cite as

The effects of optical and material properties on designing of a photonic crystal mechanical sensor

  • Longqiu LiEmail author
  • Tianlong Li
  • Fengtong Ji
  • Wenping Song
  • Guangyu Zhang
  • Yao Li
Technical Paper


Photonic crystal nanocavities, which can be used to localize electromagnetic fields in a low refractive index region, hold great promise in fabricating micromechanical sensors for their potential applications in physical, chemical and biological engineering. In this paper, effects of optical and material properties on the performance of three different types of photonic crystal based mechanical sensors, i.e., force, displacement, and strain sensors, are investigated. The microcantilevers of sensors are made in Si and Si/SiO2 and exhibited in air and water atmosphere. As we found, both the resonant wavelength and the resonant wavelength shift for microcantilever mechanical sensors exhibit a linear relationship to the signal detection parameters (i.e., force, displacement, and strain) both in air and water. The sensitivity of force and strain sensors operated in water is higher than that in air. Si/SiO2 bilayer microcantilever sensor shows a higher sensitivity in force detection, whereas the Si cantilever sensor shows a higher sensitivity in strain and vertical displacement detection. The optical, material and mechanical properties of sensor material have great effect on the sensitivity of the new photonic crystal based microcantilever mechanical sensor.


Photonic Crystal Wavelength Shift Finite Difference Time Domain Resonant Wavelength Mechanical Sensor 
These keywords were added by machine and not by the authors. This process is experimental and the keywords may be updated as the learning algorithm improves.



The authors would like to acknowledge the support of the Foundation for Innovative Research Groups of the Natural Science Foundation of China (51521003 and 51175129). This authors are also thanks the support from the special financial grant from the China Postdoctoral Science Foundation (2012T50339). We also gratefully acknowledge the financial support provided by the Program of Introducing Talents of Discipline to Universities (Grant No. B07018) and the Self-Planned Task (NO. SKLRS201607C) of State Key Laboratory of Robotics and System (HIT).


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Copyright information

© Springer-Verlag Berlin Heidelberg 2016

Authors and Affiliations

  • Longqiu Li
    • 1
    • 2
    Email author
  • Tianlong Li
    • 1
  • Fengtong Ji
    • 1
  • Wenping Song
    • 1
  • Guangyu Zhang
    • 1
  • Yao Li
    • 2
    • 3
  1. 1.School of Mechatronics EngineeringHarbin Institute of TechnologyHarbinChina
  2. 2.Postdoc Station of Material Science and EngineeringHarbin Institute of TechnologyHarbinChina
  3. 3.Center for Composite Materials and StructureHarbin Institute of TechnologyHarbinChina

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