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Circular membrane approximation model with the effect of the finiteness of the electrode’s diameter of MEMS capacitive micromachined ultrasonic transducers

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Abstract

In this paper, an analytical model for evaluation of membrane displacement, multiple resonances, mechanical impedances and bandwidth profile of capacitive micromachined ultrasonic transducers (CMUTs) developed by MEMS technology for medical imaging is presented. Improvement in the results is brought in by taking into account the finiteness of the electrodes diameter. 3-D models for practical membrane shapes are carried out by FEM PZFLEX simulation. The model shows that CMUT is a multiple resonance device. The analytical values of the fundamental resonance agree excellently with the published experimental results. The 50 µm radius devices are theoretically found to be most efficient at 2.35 MHz. The 3-dB fractional bandwidth is also evaluated from the improved analytical model. Moreover, physical solution insists that at a certain bias voltage, the residual force in the membrane will no longer resist the electrostatic force of attraction, resulting in membrane collapse which is clearly demonstrated in this work.

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References

  • Bozkurt A, Degertekin F, Atalar A, Khuri-Yakub BT (1998) Analytic modeling of loss and cross-coupling in capacitive micromachined ultrasonic transducers. IEEE Ultrason Symp: 1025–1028

  • Buhrdorf A, Ahrens O, Binder J (2001) Capacitive micromachined ultrasonic transducers and their application. IEEE Ultrason Symp: 933–940

  • Caronti A, Caliano G, Iula A, Pappalardo M (2002a) An accurate model for capacitive micromachined ultrasonic transducers. IEEE Trans Ultrason Ferroelectr Freq Control 49:159–168

    Article  Google Scholar 

  • Caronti A, Majjad H, Ballandras S, Caliano G, Carotenuto R, Iula A, Foglietti V, Pappalardo M (2002b) Vibration maps of capacitive micromachined ultrasonic transducers by laser interferometry. IEEE Trans Ultrason Ferroelectr Freq Control 49:289–292

    Article  Google Scholar 

  • Certon D, Ternifi R, Boulmea A, Legros M, Minonzio JG, Talmant M, Patat F, Remenieras JP (2013) Low frequency cMUT technology: application to measurement of brain movement and assessment of bone quality. IRBM 34:159–166

    Article  Google Scholar 

  • Ergun A, Huang Y, Zhuang X, Oralkan O, Yaralıoglu GG, Khuri Yakub BT (2005) Capacitive Micromachined Ultrasonic Transducers: fabrication Technology. IEEE Trans Ultrason Ferroelectr Freq Control 52:2242–2258

    Article  Google Scholar 

  • Hadjiloucas S, Walker GC, Bowen JW, Karatzas LS (2009) Performance limitations of piezoelectric and force feedback electrostatic transducers in different applications. J Phys Conf Ser 178:1–6

    Google Scholar 

  • Haller M, Khuri-Yakub BT (1994) A Surface Micromachined Electrostatic Ultrasonic Air Transducer. IEEE Ultrason Symp: 1241–1244

  • Johnson J, Oralkan O, Demirci U, Ergun S, Karaman M, Khuri-Yakub P (2002) Medical imaging using capacitive micromachined ultrasonic transducer arrays. Ultrasonics 40:471–476

    Article  Google Scholar 

  • Khuri-Yakub BT, Cheng CH, Degertekin FL, Ergun S, Hansen S, Jin XC, Oralkan O (2000) Silicon micromachined ultrasonic transducers. Jpn J Appl Phys 39:2883–2887

    Article  Google Scholar 

  • Ladabaum I, Jin X, Soh HT, Atalar A, Khuri-Yakub BT (1998) Surface Micromachined Capacitive Ultrasonic Transducers. IEEE Trans Ultrason Ferroelectr Freq Control 45:678–690

    Article  Google Scholar 

  • Logan AS, Wong LL, Yeow JT (2011) A 1-D capacitive micromachined ultrasonic transducer imaging array fabricated with a silicon–nitride-based fusion process. IEEE/ASME Trans Mech 16:861–865

    Article  Google Scholar 

  • Mason WP (1942) Electromechanical transducers and wave filters. D. Van Nostrand Company, New Jersey

    Google Scholar 

  • Olcum S, Senlik MN, Atalar A (2005) Optimization of the gain-bandwidth product of capacitive micromachined ultrasonic transducers. IEEE Trans Ultrason Ferroelectr Freq Control 52:2211–2219

    Article  Google Scholar 

  • Oralkan O, Jin X, Degertekin FL, Khuri-Yakub BT (1999) Simulation and Experimental Characterization of a 2-D Capacitive Micromachined Ultrasonic Transducer Array Element. IEEE Trans Ultrason Ferroelectr Freq Control 46:1337–1340

    Article  Google Scholar 

  • Park KK, Lee H, Yaralioglu GG, Ergun AS, Oralkan O, Kupnik M, Quate CF, Khuri-Yakub BT, Braun T, Ramseyer JP, Lang HP, Hegner M, Gerber C, Gimzewski JK (2007) Capacitive micromachined ultrasonic transducers for chemical detection in nitrogen. Appl Phys Lett 91:094102

    Article  Google Scholar 

  • Park KK, Lee H, Kupnik M, Oralkan O, Ramseyer JP, Lang HP, Hegner M, Gerber C, Khuri-Yakub BT (2011) Capacitive micromachined ultrasonic transducer (CMUT) as a chemical sensor for DMMP detection. Sens Actuators B 160:1120–1127

    Article  Google Scholar 

  • Rahman M, Hernandez J, Chowdhury S (2013) An Improved Analytical Method to Design CMUTs with Square Diaphragms. IEEE Trans Ultrason Ferroelectr Freq Control 60:834–845

    Article  Google Scholar 

  • Subit D, Ogam E, Shaw G, Ejima S, Cranda JR (2013) Wavelet analysis of piezoelectric transducer signals to detect rib fractures during impact tests. Int J Crashworthiness 18:251–263

    Article  Google Scholar 

  • Tsuji Y, Kupnik M, Khuri-Yakub BT (2010) Low temperature process for CMUT fabrication with wafer bonding technique. IEEE Ultrason Symp: 551–554

  • Welch JN, Johnson JA, Bax MR, Badr R, Shahidi R (2000) A real-time free hand 3-D ultrasound system for image-guided surgery. IEEE Ultrason Symp: 1601–1604

  • Yaralioglu G, Degertekint F, Badi M, Auld B, Khuri-Yakub BT (2000) Finite element method and normal mode modeling of capacitive micromachined saw and lamb wave transducers. IEEE Ultrason Symp: 129–132

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Acknowledgements

The authors are highly indebted to University Grant Commission (UGC), Ministry of Human Research Development (MHRD), Govt. of India and VLSI Design and MEMS Laboratory, Department of Electronics and Communication Engineering, Mizoram University (A Central University, Govt. of India) for supporting this technical work.

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Authors and Affiliations

  1. Department of Electronics and Communication Engineering, Mizoram University (A Central University), Aizawl, 796004, India

    Reshmi Maity & Niladri Pratap Maity

  2. Department of Electronics and Communication Engineering, National Institute of Technology, Silchar, 788 010, India

    Srimanta Baishya

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  1. Reshmi Maity
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  2. Niladri Pratap Maity
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  3. Srimanta Baishya
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Correspondence to Niladri Pratap Maity.

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Maity, R., Maity, N.P. & Baishya, S. Circular membrane approximation model with the effect of the finiteness of the electrode’s diameter of MEMS capacitive micromachined ultrasonic transducers. Microsyst Technol 23, 3513–3524 (2017). https://doi.org/10.1007/s00542-016-3184-9

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  • DOI: https://doi.org/10.1007/s00542-016-3184-9

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