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Vanadium oxide thermal microsensor integrated in a microfluidic chip for detecting cholesterol and glucose concentrations

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Abstract

A highly sensitive thermal measurement device based on a vanadium oxide (VOx) microthermistor is developed for detecting biological molecules based on enzymatic reactions. The measurement principle of the VOx thermistor relies on the temperature dependence of its electrical resistance owing to the heat generation of enzymatic reactions. The device comprises a microfluidic channel and chambers, and VOx thermistors on a suspended Si3N4 membrane for thermal insulation. The enzyme is immobilized in silica gel on the sensor. The temperature coefficient of the resistance of the fabricated VOx thermistor is −1.3 %/K. The fabricated device has a temperature resolution of 0.30 mK/√Hz and a temperature response of 4.9 mV/K. Thermal measurements of cholesterol and glucose are demonstrated using the heat production caused by enzymatic reactions. The detectable concentrations of glucose and cholesterol were 30 and 15 µM/√Hz, respectively.

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Acknowledgments

Part of this study was performed at the Micro/Nanomachining Research Education Center and the Nishizawa Center of Tohoku University. This study was supported in part by JSPS KAKENHI Grant Number 15K17450, and also supported in part by Special Coordination Funds for Promoting Science and Technology, Formation of Innovation Center for Fusion of Advanced Technologies.

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Authors and Affiliations

  1. Microsystem Integration Center, Tohoku University, Sendai, 980-0845, Japan

    Naoki Inomata

  2. Graduate School of Engineering, Tohoku University, Sendai, 980-8579, Japan

    Libao Pan & Takahito Ono

  3. Research Institute for Engineering and Technology, Tohoku Gakuin University, Sendai, 985-8537, Japan

    Zhuqing Wang & Mitsuteru Kimura

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  1. Naoki Inomata
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  2. Libao Pan
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  3. Zhuqing Wang
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  4. Mitsuteru Kimura
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  5. Takahito Ono
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Correspondence to Naoki Inomata.

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Inomata, N., Pan, L., Wang, Z. et al. Vanadium oxide thermal microsensor integrated in a microfluidic chip for detecting cholesterol and glucose concentrations. Microsyst Technol 23, 2873–2879 (2017). https://doi.org/10.1007/s00542-016-3090-1

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  • DOI: https://doi.org/10.1007/s00542-016-3090-1

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