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Shear effect on dynamic behavior of microcantilever beam with manufacturing process defects

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Abstract

This paper is concerned with the investigation of the shear effect on the dynamic behavior of a thin microcantilever beam with manufacturing process defects. Unlike the Rayleigh beam model (RBM), the Timoshenko beam model (TBM) takes in consideration the shear effect on the resonance frequency. This effect become significant for thin microcantilever beams with larger slenderness ratios that are normally encountered in MEMS devices such as sensors. The TBM model is presented and analyzed by numerical simulation using Finite Element Method (FEM) to determine corrective factors for the correction of the effect of manufacturing process defects like the underetching at the clamped end of the microbeam and the nonrectangular cross section of the area. A semi-analytical approach is proposed for the extraction of the Young’s modulus from 3D FEM simulation with COMSOL Multiphysics software. This model was tested on measurements of a thin chromium microcantilever beam of dimensions (80 × 2 × 0.95 μm3). Final results indicate that the correction of the effect of manufacturing process defects is significant where the corrected value of Young’s modulus is very close to the experimental results and it is about 280.81 GPa.

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Acknowledgments

This work was supported by the Algerian PNR domiciled in FUNDAPL Laboratory, University of Blida (Algeria).

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Authors and Affiliations

  1. Laboratory FUNDAPL, University of Blida, BP 270, 09000, Blida, Algeria

    Hicham Bourouina & Mohammed El Amine Benamar

  2. FEMTO-ST Institute, University of Bourgogne Franche-Comté, CNRS, 25044, Besançon, France

    Réda Yahiaoui

  3. Nanomedecine Lab, University of Bourgogne Franche Comté, 25000, Besançon, France

    Elmar Yusifli & Guillaume Herlem

  4. École Nationale des Sciences Appliquées d’Oujda (ENSAO), Complexe Universitaire, BP 669, 60000, Oujda, Morocco

    Kamal Ghoumid

  5. Centre de Développement des Energies Renouvelables (CDER), Route de l’Observatoire, Bouzaréah, BP 62, 16340, Algiers, Algeria

    Hicham Bourouina

Authors
  1. Hicham Bourouina
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  2. Réda Yahiaoui
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  3. Elmar Yusifli
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  4. Mohammed El Amine Benamar
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  5. Kamal Ghoumid
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  6. Guillaume Herlem
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Correspondence to Réda Yahiaoui.

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Bourouina, H., Yahiaoui, R., Yusifli, E. et al. Shear effect on dynamic behavior of microcantilever beam with manufacturing process defects. Microsyst Technol 23, 2537–2542 (2017). https://doi.org/10.1007/s00542-016-3078-x

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  • DOI: https://doi.org/10.1007/s00542-016-3078-x

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