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Development of a continuous injection direct rolling imprint system for microstructure thin-plate

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Abstract

A prototype of a continuous injection direct rolling (CIDR) imprint system was developed and applied to CIDR tests to evaluate its feasibility for the large-area replication of an optical micro device. The developed system adopts the theories of injection compression and thermal imprinting and presents the capacity to fabricate a 200 mm-wide and over 10 m-long PMMA plate and to replicate ultra-precision structures on its surface at a rolling speed range of 1.1–11.5 mm/s. Under the given CIDR conditions (injection temperature, 280 °C; injection pressure, 6 MPa; rolling force, 13 MPa; roller temperature, 85 °C), complete fabricating of a 0.7 mm-thick Polymethyl methacrylate (PMMA) plate with 17.3 μm-deep and 35 μm-wide V-groove microstructures was achieved at a rolling speed of 3.4 mm/s. Finally, a light guide plate for a backlight panel was fabricated by CIDR. The light transmittance of this plate reached 90.8 %, the maximum birefringence was ~99 nm and its average haze was 0.51 %.

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Acknowledgments

The authors gratefully acknowledge research support from the National Natural Science Foundation of China (No. 5167050553), as well as from the Production and Research Project in Guangdong province (No. 2013B090600020).

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Correspondence to Yan Lou.

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Lou, Y., Wu, G., Li, J. et al. Development of a continuous injection direct rolling imprint system for microstructure thin-plate. Microsyst Technol 23, 2509–2519 (2017). https://doi.org/10.1007/s00542-016-3041-x

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  • DOI: https://doi.org/10.1007/s00542-016-3041-x

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