Abstract
In this paper, a novel micro-scale nano-manipulator capable of positioning in six degrees of freedom (DOF) is introduced. Undesired deflections, while operating in a specific DOF, are restricted by the aid of distinctive design of flexure hinges and actuators’ arrangements. The compliant mechanism is actuated by thermo-electro-mechanical actuators, as they could be integrated and exert large forces in a nanometer resolution. The actuators are bidirectional capable of applying force in both transverse and longitudinal directions. Performance of the two degrees of freedom actuator is thoroughly explored via numerical and analytical analyses, showing a good agreement. The workspace and performance of the precision positioner is studied using finite element methods. Finally, identification of forward and inverse kinematic of the nano-manipulator is performed utilizing neural network concept. A well-trained and appropriate neural network can efficiently replace the time-consuming and complex analytical and experimental methods.
Similar content being viewed by others
References
Chen WC, Chu CC, Hsieh J, Fang W (2003) A reliable single layer out of plane micromachined thermal actuator. Sens Actuators A 103:48–53
Chen SC, Culpepper ML (2006) Design of a six-axis micro-scale nanopositioner-μHexFlex. Precis Eng 30:314–324
Chen SC (2003) A six-degree-of-freedom compliant micro-manipulator for silicon optical bench. M.S. Thesis, Massachusetts Institute of Technology
Culpepper ML, Anderson G (2004) Design of a low-cost nano-manipulator which utilizes a monolithic, spatial compliant mechanism. Precis Eng 28:469–482
Dash JN, Jha R, Villatoro J, Dass S (2015) Nano-displacement sensor based on photonic crystal fiber modal interferometer. Opt Lett 40:467–470
Hosseini N, Nievergelt AP, Adams JD, Stavrov VT, Fantner GE (2016) A monolithic MEMS position sensor for closed-loop high-speed atomic force microscopy. Nanotechnology 27:135705
Incorpera FP, De Witt DP (2002) Introduction to heat transfer, 4th edn. Wiley, NewYork, pp 239–271
Lai Y, Kujath M, Hubbard T (2005) Modal simulation and testing of a micro-manipulator. J Dyn Syst Meas Contr 127:515–519
Moulton T, Ananthasuresh GK (2001) Micromechanical devices with embedded electro-thermal compliant actuators. Sens Actuators A 90:38–48
Rubio-Sierra FJ, Heckl WM, Stark RW (2005) Nanomanipulation by atomic force microscopy. Adv Eng Mater 7:193–196
Sitti M, Hashimoto H (2000) Controlled pushing of nanoparticles: modeling and experiments. IEEE/ASME Trans Mechantron 5:199–211
Sutherland J et al (1995) Optical coupling and alignment tolerances in optoelectronic array interface assemblies. IEEE electronic components and technology conference
Trease BP, Moon YM, Kota S (2005) Design of large displacement compliant joints. Trans ASME 127:788–798
Yao Q, Dong J, Ferreira PM (2007) Design, analysis, fabrication and testing of a parallel-kinematic micropositioning XY stage. Int J Mach Tools Manuf 47:946–961
Zbikowsh R et al (1994) A review of advances in neural adaptive control systems. NACT technical report 8039
Author information
Authors and Affiliations
Corresponding author
Rights and permissions
About this article
Cite this article
Akbari, S., Pirbodaghi, T. Precision positioning using a novel six axes compliant nano-manipulator. Microsyst Technol 23, 2499–2507 (2017). https://doi.org/10.1007/s00542-016-2931-2
Received:
Accepted:
Published:
Issue Date:
DOI: https://doi.org/10.1007/s00542-016-2931-2