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Multifunctional thin film sensor system as monitoring system in production

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Abstract

The two most important measurement categories in production are temperature and load. Therefore commercial sensors are applied in machinery as near as possible to the working parts. For a cost efficient production the integration of sensor elements directly on top of the surface in the heavily loaded regions is essential to get the real temperature and load distributions during the production process. Therefore a new multifunctional thin film sensor system is in development. This multilayer system combines thermoresistive sensor structures with piezoresistive ones and exists out of wear resistant carbon based layers (Bewilogua and Hofmann, Surf Coat Technol 242:214–225, 2014; Biehl et al. Thin Solid Films 515:1171–1175, 2006; Biehl et al. Microsystem Technologies, Springer, 2010; Biehl et al. Microsystem Technologies, Springer, 2014; Robertson, Daim Relat Mater 12:79–84, 2003). The sensor data will lead to a deeper process understanding, to optimization of simulation tools, to reduction of rejects and to an improvement of flexibility in production.

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References

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Acknowledgments

The results were obtained within the SensoFut project (Sensorized Future—Sensing of temperature and pressure in harsh environments), on which the Fraunhofer IST worked together with the Fraunhofer Institute for Machine Tools and Forming Technology IWU and Sirris, the Belgian research association. SensoFut is funded in the 13th Cornet Call (Collective Research Networking) by the Federal Ministry of Economics and Technology (BMWI) and the German Federation of Industrial Research Associations (AiF).

The authors like to thank Carl Emmerechts from the research organization Sirris in Belgium for his support. Also the authors express their gratitude to Jonas Stübing and Dennie Herrmann for their great performance in layer deposition.

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Correspondence to Saskia Biehl.

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Biehl, S., Rumposch, C., Paetsch, N. et al. Multifunctional thin film sensor system as monitoring system in production. Microsyst Technol 22, 1757–1765 (2016). https://doi.org/10.1007/s00542-016-2831-5

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  • DOI: https://doi.org/10.1007/s00542-016-2831-5

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