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Scale factor model analysis of MEMS gyroscopes

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Abstract

Scale factor nonlinearity is one of the main errors of MEMS gyroscopes. The paper firstly analyzes the operating principle of MEMS gyroscopes, and presents the commonly used model in calibration process. It is proved that calibrating the gyroscope scale factor in segments will result in higher fitting accuracy. Since it is difficult to determine the inverse function of a higher order function in microprocessor, this paper has developed a new calibration model, including the selection of suitable segment points based on the fitting residual error. The paper further analyses and compensates for the temperature effect on scale factor due to its sever influences. The enhanced model with the proposed temperature compensation has further improved the fitting accuracy significantly.

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Acknowledgments

The work was supported by Support Program of National Ministry of Education of China (No. 625010110) and National Natural Science Foundation of China (No. 61179043).

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Authors and Affiliations

  1. Key Laboratory of Optoelectronic Devices and Systems of Ministry of Education and Guangdong Province, Shenzhen University, Shenzhen, 518060, People’s Republic of China

    Qijian Tang

  2. MOEMS Education Ministry Key Laboratory, Tianjin University, Tianjin, 300072, People’s Republic of China

    Qijian Tang & Xiangjun Wang

  3. School of Engineering and Design, Brunel University, Uxbridge, Middlesex, UB8 3PH, UK

    Qingping Yang

Authors
  1. Qijian Tang
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  2. Xiangjun Wang
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  3. Qingping Yang
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Correspondence to Qijian Tang.

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Tang, Q., Wang, X. & Yang, Q. Scale factor model analysis of MEMS gyroscopes. Microsyst Technol 23, 1215–1219 (2017). https://doi.org/10.1007/s00542-016-2825-3

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  • DOI: https://doi.org/10.1007/s00542-016-2825-3

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