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Gas-assisted light-cure microstructure transfer molding and transfer transformation

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Abstract

This study conducted technical research into gas-assisted light-cure transfer molding and transfer transformation. With the self-developed light-cure transfer molding system, we created the system devices through mechanical processing. Then, the soft micro-nanometer structure was combined with different gas pressures and experimental parameters to explore the formation of micro-structural components. Meanwhile, the gas pressure was increased to achieve transfer transformation and analysis. According to the experimental results, the duplicated formation would lead to complete formation with the increased gas pressure. Moreover, this study indicated that excessive gas pressure would transform the microstructure, and then change the height and shape of the micro-structural components after transfer molding. This study also analyzed the transformation to gain information regarding transfer molding and transformation under the conditions, and thus, obtain the array microstructure of various forms. It is predicted that this study can be regarded as an option for the fabrication of micro-systematic structural components.

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Authors and Affiliations

  1. Department of Mechanical and Energy Engineering, National Chiayi University, No. 300, Syuefu Rd., Chiayi, 600, Taiwan, ROC

    Yung-Jin Weng, Che-Lin Chang & Yi-Hui Hsiao

  2. Center of Energy Research and Sensor Technology, National Chiayi University, No. 300, Syuefu Rd., Chiayi, 600, Taiwan, ROC

    Yung-Jin Weng

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  1. Yung-Jin Weng
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  2. Che-Lin Chang
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  3. Yi-Hui Hsiao
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Correspondence to Yung-Jin Weng.

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Weng, YJ., Chang, CL. & Hsiao, YH. Gas-assisted light-cure microstructure transfer molding and transfer transformation. Microsyst Technol 23, 1081–1090 (2017). https://doi.org/10.1007/s00542-016-2823-5

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  • DOI: https://doi.org/10.1007/s00542-016-2823-5

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