Microsystem Technologies

, Volume 22, Issue 7, pp 1639–1651 | Cite as

Up-scaled macro-device implementation of a MEMS wideband vibration piezoelectric energy harvester design concept

Technical Paper


In this work, we discuss a novel mechanical resonator design for the realisation of vibration Energy Harvester (EH) capable to deliver power levels in the mW range. The device overcomes the typical constraint of frequency narrowband operability of standard cantilevered EHs, by exploiting a circular-shaped resonator with an increased number of mechanical Degrees Of Freedom (DOFs), leading to several resonant modes in the range of vibrations of interest (i.e. multi-modal wideband EH). The device, named Four-Leaf Clover (FLC), is simulated in Ansys Workbench™, showing a significant number of resonant modes up to vibrations of around 2 kHz (modal eigenfrequencies analysis), and exhibiting levels of converted power up to a few mW at resonance (harmonic coupled-field analysis). The FLC mechanical structure, along with cantilevered test structure, is realised by micro-milling of an Aluminium foil. PolyVinyliDene Fluoride (PVDF) film sheet pads are assembled in order to collect first experimental feedback on generated power levels. The FLC and cantilevered EH test structures are characterised experimentally with a measurement setup purposely developed, showing encouraging performance related to the technology chosen for the realisation of EH, thus paving the way for full validation of the macro-FLC concept.


PVDF Energy Harvesting Resonant Mode Proof Mass Device Under Test 
These keywords were added by machine and not by the authors. This process is experimental and the keywords may be updated as the learning algorithm improves.


  1. Cottone F, Basset P, Vocca H, Gammaitoni L (2012) Electromagnetic Buckled Beam Oscillator for Enhanced Vibration Energy Harvesting. IEEE International Conference on Green Computing and Communications (GreenCom) 624–627Google Scholar
  2. Cugat O, Delamare J, Reyne G (2003) Magnetic micro-actuators and systems (MAGMAS). IEEE Trans Magn 39:3607–3612CrossRefGoogle Scholar
  3. Erturk A, Inman DJ (2011) Piezoelectric energy harvesting. John Wiley & Sons, HobokenCrossRefGoogle Scholar
  4. Iannacci J, Serra E, Di Criscienzo R, Sordo G, Gottardi M, Borrielli A, Bonaldi M, Kuenzig T, Schrag G, Pandraud G, Sarro PM (2014) Multi-modal vibration based MEMS energy harvesters for ultra-low power wireless functional nodes. Springer Microsystem Technologies 20:627–640CrossRefGoogle Scholar
  5. Iannacci J, Sordo G, Serra E, Schmid U (2015) A novel MEMS-based piezoelectric multi-modal vibration energy harvester concept to power autonomous remote sensing nodes for internet of things (IoT) applications. IEEE Sensors 2015 International Conference 1457–1460Google Scholar
  6. Kaźmierski TJ, Beeby S (eds) (2010) Energy harvesting systems: principles. Modeling and Applications, SpringerGoogle Scholar
  7. Kok S-L, Ab Rahman MF, Yap DFW, Ho YH (2011) Bandwidth widening strategies for piezoelectric based energy harvesting from ambient vibration sources. IEEE International Conference on Computer Applications and Industrial Electronics (ICCAIE) 492–496Google Scholar
  8. Lallart M (ed) (2012) Small-scale energy harvesting. InTech, RijekaGoogle Scholar
  9. Liu SW, Lye SW, Miao JM (2012) Sandwich structured electrostatic/electrets parallel-plate power generator for low acceleration and low frequency vibration energy harvesting. IEEE 25th International Conference on Micro Electro Mechanical Systems (MEMS) 1277–1280Google Scholar
  10. Qiaochu Tang Q, Li X (2015) Two-stage wideband energy harvester driven by multimode coupled vibration. IEEE/ASME Trans Mechatron 20:115–121CrossRefGoogle Scholar
  11. Raju M (2008) Energy Harvesting ULP meets energy harvesting: a game-changing combination for design engineers. White Paper, Texas Instruments, DallasGoogle Scholar
  12. Roundy S, Wright PK, Rabaey JM (2004) Energy scavenging for wireless sensor networks: with special focus on vibrations. Kluwer Academic Publishers, DordrechtCrossRefGoogle Scholar
  13. Tan YK (ed) (2011) Sustainable Energy Harvesting Technologies—Past, Present and Future. InTech, RijekaGoogle Scholar
  14. Tao K, Ding G, Wang P, Yang Z, Wang Y (2012) Fully integrated micro electromagnetic vibration energy harvesters with micro-patterning of bonded magnets. IEEE 25th International Conference on Micro Electro Mechanical Systems (MEMS) 1237–1240Google Scholar
  15. Uckelmann D, Harrison M, Michahelles F (eds) (2011) Architecting the Internet of Things. Springer, BerlinGoogle Scholar
  16. Vermesan O, Friess P (eds) (2014) Internet of things applications—from research and innovation to market deployment. River Publishers, AalborgGoogle Scholar
  17. Vullers RJM, Schaijk RV, Visser HJ, Penders J, Hoof CV (2010) Energy harvesting for autonomous wireless sensor networks. IEEE Solid-State Circuits Mag 2:29–38CrossRefGoogle Scholar
  18. Wahied GA, Gihan N (2012) Design considerations for piezoelectric energy harvesting systems. International Conference on Engineering and Technology (ICET) 1–6Google Scholar
  19. Wang H, Zhou X, Qiu W, Fu B, Wen L (2014) Simulation and experiments of broadband piezoelectric energy harvesting devices. IEEE International Conference on Nano/Micro Engineered and Molecular Systems (NEMS) 618–662Google Scholar

Copyright information

© Springer-Verlag Berlin Heidelberg 2015

Authors and Affiliations

  1. 1.MicroSystems Technology (MST) Research Unit, Center for Materials and Microsystems (CMM)Fondazione Bruno Kessler (FBK)TrentoItaly

Personalised recommendations