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Pull-in instability of double clamped microbeams under dispersion forces in the presence of thermal and residual stress effects using nonlocal elasticity theory

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Abstract

The present study deals with the consideration of the small-scale effects on the pull-in instability of micro-switches subjected to electrostatic and intermolecular forces in the presence of thermal and residual stress effects. Using Eringen’s nonlocal elasticity theory along with the nonlocal Euler–Bernoulli beam model, the equilibrium equation is derived in the presence of thermal and residual stress effects using virtual displacement principle. The static governing equation, which is extremely nonlinear due to the intermolecular and electrostatic attraction forces plus thermal and residual effects, is solved numerically by Galerkin method. The accuracy of the solution is verified by comparing the obtained results with the existing numerical, analytical, and experimental models. Finally, a comprehensive study is carried out to determine the influence of nonlocal parameters on the pull-in instability characteristics of double clamped microbeam in the presence of thermal and residual stresses.

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Authors and Affiliations

  1. Department of Mechanical Engineering, Tarbiat Modares University, P.O. Box 14115-177, Tehran, Iran

    Fateme Tavakolian, Amin Farrokhabadi & Majid Mirzaei

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  1. Fateme Tavakolian
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  2. Amin Farrokhabadi
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  3. Majid Mirzaei
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Correspondence to Amin Farrokhabadi.

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Tavakolian, F., Farrokhabadi, A. & Mirzaei, M. Pull-in instability of double clamped microbeams under dispersion forces in the presence of thermal and residual stress effects using nonlocal elasticity theory. Microsyst Technol 23, 839–848 (2017). https://doi.org/10.1007/s00542-015-2785-z

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  • DOI: https://doi.org/10.1007/s00542-015-2785-z

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