Abstract
A novel composite control strategy is developed in this paper to compensate hysteresis, resonance and disturbances in a piezo-actuated nanopositioner. The control objective of the piezoelectric positioner is to achieve high tracking performance in terms of accuracy and speed. For this purpose, a Bouc–Wen model based hysteresis compensator is first applied to mitigate the hysteresis nonlinearity without the complex inverse hysteresis calculation. And then, the linear dynamic of the hysteresis compensated system is identified and inverted to account for the resonance. A model-based inversion feed-forward controller is designed to achieve high speed tracking. Afterwards, a high-gain feedback controller is designed based on a notch filter to handle the modeling inaccuracy and all kinds of disturbances. So, the feed-forward controller can be augmented to the feedback controller to realize high speed and precision tracking. The enhancement of tracking performance is demonstrated through several comparative experiments. The performance of 70 Hz bandwidth and 0.281 μm precision can be achieved, which validated the effectiveness of the proposed composite control scheme.
Similar content being viewed by others
References
Al Janaideh M, Rakheja S, Su CY (2011) An analytical generalized Prandtl–Ishlinskii model inversion for hysteresis compensation in micropositioning control. IEEE/ASME Trans Mechatron 16(4):734–744
Ando T, Uchihashi T, Fukuma T (2008) High-speed atomic force microscopy for nanovisualization of dynamic biomolecular processes. Prog Surf Sci 83:337–437
Braunsmann C, Schaffer TE (2010) High-speed atomic force microscopy for large scan sizes using small cantilevers. Nanotechnology 21:225705
Chae KW, Kim W-B, Jeong YH (2011) A transparent polymeric flexure-hinge nanopositioner, actuated by a piezoelectric stack actuator. Nanotechnology 22:335501
Chang S, Yi J, Shen Y (2009) Disturbance observer-based hysteresis compensation for piezoelectric actuators. In: Proceedings of American control conference, pp 4196–4201
Chen X, Li Y (2007) A modified PSO structure resulting in high exploration ability with convergence guaranteed. IEEE Trans Cybern 37(5):1271–1289
Chen BM, Lee TH, Hang CC, Guo Y, Weerasmriya S (1999) An H-infinite almost disturbance decoupling robust controller design for a piezoelectric bimorph actuator with hysteresis. IEEE Tran Autom Control 7(2):160–174
Clayton GM, Tien S, Leang KK, Zou Q, Devasia S (2009) A review of feedforward control approaches in nanopositioning for high-speed SPM. J Dyn Syst Meas Control 131(6):061101
Croft D, Shed G, Devasia S (2001) Creep, hysteresis, and vibration compensation for piezoactuators: atomic force microscopy application. ASME J Dyn Syst Meas Control 123(1):35–43
Garrett MC, Szuchi T, Kam KL et al (2009) A review of feedforward control approaches in nanopositioning for high-speed SPM. J Dyn Syst Meas Control-Trans ASME 131(6):061101
Ge P, Jouaneh M (1996) Tracking control of a piezoceramic actuator. IEEE Trans Control Syst Technol 4(3):209–216
Goldfarb M, Celanovic N (1997) Modeling piezoelectric stack actuators for control of micromanipulation. IEEE Contr Syst Mag 17(3):69–79
Gozen BA, Ozdoganlar OB (2012) A method for open-loop control of dynamic motions of piezo-stack actuators. Sens Actuators A Phys 184:160–172
Gu GY, Zhu LM (2011) Modeling of rate-dependent hysteresis in piezoelectric actuators using a family of ellipses. Sens Actuators A Phys 165(2):202–209
Gu G, Zhu L (2013a) Motion control of piezoceramic actuators with creep, hysteresis and vibration compensation. Sens Actuat A Phys 197:76–87
Gu G-Y, Zhu L-M (2013b) Motion control of piezoceramic actuators with creep, hysteresis and vibration compensation. Sens Actuators A Phys 197:76–87
Gu GY, Zhu LM, Su CY, Ding H (2013) Motion control of piezoelectric positioning stages: modeling, controller design and experimental evaluation. IEEE/ASME Trans Mechatron 18(5):1459–1471
Gu G, Zhu L, Su C (2014) Integral resonant damping for high-bandwidth control of piezoceramic stack actuators with asymmetric hysteresis nonlinearity. Mechatronics 24(4):367–375
Higuchi T (2010) Next generation actuators leading breakthroughs. J Mech Sci Technol 24:13–18
Huang D, Xu J-X, Venkataramanan V, The Cat Tuong Huynh (2014) High-performance tracking of piezoelectric positioning stage using current-cycle iterative learning control with gain scheduling. IEEE Trans Industr Electron 61(2):1085
Humphris ADL, Miles MJ, Hobbs JK (2005) A mechanical microscope: high-speed atomic force microscopy. Appl Phys Lett 86:034106
Leang KK, Devasia S (2007) Feedback-Linearized inverse feedforward for creep, hysteresis, and vibration compensation in AFM piezoactuators. IEEE Transac Control Syst Technol 15(5):927–935
Leang KK, Zou Q, Devasia S (2009) Feedforward control of piezoactuators in atomic force microscope systems inversion-based compensation for dynamics and hysteresis. IEEE Control Syst Mag 29(1):70–82
Liaw HC, Shirinzadeh B (2009) Neural network motion tracking control of piezo-actuated flexure-based mechanisms for micro-/nanomanipulation. IEEE/ASME Trans Mechatron 15(4):517–527
Lei L et al (2013) Discrete composite control of piezoelectric actuators for high-speed and precision scanning. IEEE Trans Ind Inf 9(2):859–868
Lin C-M, Li H-Y (2014) Intelligent control using the wavelet fuzzy CMAC backstepping control system for two-axis linear piezoelectric ceramic motor drive systems. IEEE Trans Fuzzy Syst 22(4):791–802
Liu L, Tan KK, Lee TH (2014) Multirate-based composite controller design of piezoelectric actuators for high-bandwidth and precision tracking. IEEE Trans Control Syst Technol 22:2
Mahmood I, Moheimani S (2009) Making a commercial atomic force microscope more accurate and faster using positive position feedback control. Rev Sci Instrum 80:063705
Pantazi A, Sebastian A, Cherubini G, Lantz M, Pozidis H, Rothuizen H, Eleftheriou E (2007) Control of MEMS-based scanning-probe data-storage devices. IEEE Trans Control Syst Technol 15:824–841
Rakotondrabe M (2011) Bouc–Wen modeling and inverse multiplicative structure to compensate hysteresis nonlinearity in piezoelectric actuators. IEEE Trans Autom Sci Eng 8(2):428–431
Ruppel T, Osten W, Sawodny O (2011) Model-based feedforward control of large deformable mirrorsg. Eur J Control 3:261–272
Shieh HJ, Hsu CH (2008) An adaptive approximator-based backstepping control approach for piezoactuator-driven stages. IEEE Trans Ind Electron 55(4):1729–1738
Tao G, Kokotovic PV (1995) Adaptive Control of Plants with Unknown Hysteresis. IEEE Trans Autom Control 40(2):200–212
Tian F, Li K, Wang J, Wang H (2014) Adaptive backstepping sliding mode control of fast steering mirror driven by piezoelectric actuator. High Power Laser Part Beams 26(1):59–63
Tuma T, Lygeros J, Kartik V, Sebastian A, Pantazi A (2012) High-speed multiresolution scanning probe microscopy based on Lissajous scan trajectories. Nanotechnology 23:185501
Vettiger P, Cross G, Despont M et al (2002) The millipede-nanotechnology entering data storage. IEEE Trans Nanotechnol 1:39–55
Viswamurthy S, Ganguli R (2007) Modeling and compensation of piezoceramic actuator hysteresis for helicopter vibration control. Sens Actuators A Phys 135(2):801–810
Vorbringer-Dorozhovets N, Hausotte T, Manske E, Shen JC, Jager G (2011) Novel control scheme for a high-speed meteorological scanning probe microscope. Meas Sci Technol 22(9):094012
Wang G, Rao C (2015) Adaptive control of piezoelectric fast steering mirror for high precision tracking application. Smart Mater Struct 24(3):035019
Wang G, Guan C, Zhang X, Zhou H, Rao C (2014) Precision control of piezo-actuated optical deflector with nonlinearity correction based on hysteresis model. Opt Laser Technol 57:26–31
Geng W, Jianwei N, Fuzhong B (2015) High precision tracking control of piezoelectric fast steering mirror based on self-tuning PID algorithm. J Henan Polytech Univ (Natural Science) accept
Wong PK, Xu Q, Vong CM, Wong HC (2012) Rate-dependent hysteresis modeling and control of a piezostage using online support vector machine and relevance vector machine. IEEE Trans Ind Electron 59(4):1988–2001
Wu Y, Zou Q (2009) Robust inversion-based 2-DOF control design for output tracking: piezoelectric-actuator example. IEEE Trans Control Syst Technol 17(5):1069–1082
Zhenyan W, Zhen Z, Jianqin M (2012) Precision tracking control of piezoelectric actuator based on Bouc–Wen hysteresis compensator. Electron Lett 48(23):1459–1460
Acknowledgments
This work was supported by the Doctoral Science Foundation of Henan Polytechnic University under Grant No. 60407/010.
Author information
Authors and Affiliations
Corresponding author
Rights and permissions
About this article
Cite this article
Wang, G., Chen, G. & Bai, F. High-speed and precision control of a piezoelectric positioner with hysteresis, resonance and disturbance compensation. Microsyst Technol 22, 2499–2509 (2016). https://doi.org/10.1007/s00542-015-2638-9
Received:
Accepted:
Published:
Issue Date:
DOI: https://doi.org/10.1007/s00542-015-2638-9