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Mechanism design with rotational and positioning calibrations for double-sided structure replication

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Abstract

This study is designing a mechanism with functions of rotational and positioning calibrations. This mechanism was applied to a hot embossing mold used for replications of double-sided structure. The hot embossed product was measured for double sided structures. The rotational and positioning alignment errors for both sides were measured by using a microscope. According to the results, the errors were calibrated wit this mechanism. The positioning and rotational resolutions of this mechanism are 40 μm and 0.5°, respectively. The results show that the mechanism has acceptable calibration accuracy. The average calibration accuracy for X-axis, Y-axis and C-axis were 92.5, 91.75 and 98.67 %, respectively. The small errors were induced by the large temperature difference between upper die and lower die during rapid cooling of a hot embossing process.

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References

  • Datta P, Goettert J (2007) Method for polymer hot embossing process development. Microsyst Technol 13:265–270

    Article  Google Scholar 

  • He Y, Jian-Zhong F, Chen Z-C (2008) Optimization of control parameters in micro hot embossing. Microsyst Technol 14:325–329

    Article  Google Scholar 

  • Itagaki H, Tsutsumi M (2014) Control system design of a linear motor feed drive system using virtual friction. Precis Eng 38:237–248

    Article  Google Scholar 

  • Li JM, Liu C, Peng J (2008) Effect of hot embossing process parameters on polymer flow and microchannel accuracy produced without vacuum. J Mater Process Technol 207:163–171

    Article  Google Scholar 

  • Liu CH, Jywe W-Y (2004) A four-degrees-of-freedom microstage for the compensation of eccentricity of a roundness measurement machine. Int J Mach Tools Manuf 44:365–371

    Article  Google Scholar 

  • Sahli M, Millot C, Roques-Carmes C, Malek CK (2009) Experimental analysis and numerical modelling of the forming process of polypropylene replicas of micro-cavities using hot embossing. Microsyst Technol 15:827–835

    Article  Google Scholar 

  • Shimizua Y, Penga Y, Kanekoa J, Azumaa T, Itoa S, Gaoa W, Lub T-F (2013) Design and construction of the motion mechanism of an XY micro-stage for precision positioning. Sens Actuators A 201:395–406

    Article  Google Scholar 

  • Wu C-H, Chiu C-H (2011) Hot embossing with two-axis micro-positioning for double-sided microstructures. J Adv Sci Lett 4:1308

    Article  Google Scholar 

Download references

Acknowledgments

This work was supported by the National Science Council under NSC Grant NSC 99-2221-E-151-032.

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Authors and Affiliations

  1. Department of Mold and Die Engineering, National Kaohsiung University of Applied Sciences, Kaohsiung, 807, Taiwan

    Cheng-Hsien Wu & Cheng-Hao Chiu

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  1. Cheng-Hsien Wu
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  2. Cheng-Hao Chiu
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Correspondence to Cheng-Hsien Wu.

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Wu, CH., Chiu, CH. Mechanism design with rotational and positioning calibrations for double-sided structure replication. Microsyst Technol 22, 2521–2527 (2016). https://doi.org/10.1007/s00542-015-2592-6

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  • DOI: https://doi.org/10.1007/s00542-015-2592-6

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