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Reliable response of RF MEMS LTCC packaged switches after mechanical and thermal stress

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Abstract

Space components need a ground characterization based on several solicitations, including mechanical and thermal stress, before their final qualification. In this paper, RF MEMS switches designed for redundancy logic have been extensively measured with promising results in terms of thermal and mechanical cycles. Packaging contributions have also been discussed.

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Acknowledgments

Supported by the ESA Contract No: 20847/07/NL/GLC on “High Reliability MEMS Redundancy Switch”.

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Correspondence to R. Marcelli.

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Lucibello, A., Capoccia, G., Proietti, E. et al. Reliable response of RF MEMS LTCC packaged switches after mechanical and thermal stress. Microsyst Technol 22, 495–501 (2016). https://doi.org/10.1007/s00542-015-2577-5

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  • DOI: https://doi.org/10.1007/s00542-015-2577-5

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