Abstract
This paper studies the effect of multiple geometric parameters of a micronozzle on a MEMS solid propellant thruster (MSPT) and establishes a quantitative optimisation model. Influences of the structural parameters of the micronozzle on performance are accurately calculated. The significance and contribution ratio of each parameter are evaluated by F distribution. Correspondingly, a horizontal MSPT is fabricated and tested to prove the optimisation model. In the implementation, a complete microigniter is formed by a single layer of Au, achieving an ultra-low ignition voltage of 2.1 V with an extremely low ignition resistance of 4 Ω.
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This research was sponsored by the Fundamental Research Funds for the Central Universities (Grant No. 3102014JC02010505).
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Shen, Q., Yuan, W., Xie, J. et al. A quantitative optimisation model for a horizontal MEMS solid propellant thruster with experimental verification. Microsyst Technol 22, 847–859 (2016). https://doi.org/10.1007/s00542-015-2486-7
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DOI: https://doi.org/10.1007/s00542-015-2486-7