Microsystem Technologies

, Volume 21, Issue 10, pp 2233–2240 | Cite as

System-level simulation and implementation for a high Q capacitive accelerometer with PD feedback compensation

  • Zhaohui Song
  • Teng Sun
  • Jian Wu
  • Lufeng Che
Technical Paper


Based on the challenge of high-Q capacitive accelerometer, the analysis of the structure and the dynamic response of an all-silicon sandwich accelerometer are conducted. An analog closed-loop interface circuit based on proportional-differential feedback compensation is designed and simulated by SIMULINK/SIMSCAPE in order to stabilize the sensor and increase the closed-loop damping. Based on the design, a printed circuit board level circuit and an ASIC circuit are made for the test. Simulation and measurement are provided to support the design. Measurement results show that the circuit effectively improves the dynamic response time of the system. The accelerometer with ASIC circuit has the scale factor of 0.9976 V/g and the second order non-linearity of −400 ppm g/g2 in the range of ±1 g, the average noise floor is 2 μg/√Hz (0–200 Hz).


Step Response Proof Mass System Level Simulation Feedback Compensation Force Phase 
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The authors gratefully acknowledge the support from NSAF (Grant No. U1430133) and the National High Technology Research and Development Program of China (863 Program) under grant 2012AA061102.


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Copyright information

© Springer-Verlag Berlin Heidelberg 2014

Authors and Affiliations

  1. 1.State Key Laboratory of Transducer Technology, Science and Technology on Microsystem LaboratoryShanghai Institute of Microsystem and Information Technology, Chinese Academy of SciencesShanghaiChina

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