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A comprehensive study on RF MEMS switch

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Abstract

This paper emphasis on state-of-the-art of the earlier until the current trend and demand, principles, design considerations, key performance and fabrication technology of RF MEMS switch devices developed over the past few years. RF MEMS switch performance and features such as actuation voltage, insertion loss, isolation and ease with cost of fabrication and applications are compared and discussed.

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Authors and Affiliations

  1. Department of Electrical and Electronics Engineering, Faculty of Engineering, Universiti Putra Malaysia (UPM), Serdang, Selangor, 43400, Malaysia

    H. Jaafar, K. S. Beh, N. A. M. Yunus, W. Z. W. Hasan & S. Shafie

  2. Faculty of Electrical and Electronic Engineering, Universiti Sains Malaysia (USM), Engineering Campus, Transkrian, Penang, Malaysia

    O. Sidek

Authors
  1. H. Jaafar
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  2. K. S. Beh
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  3. N. A. M. Yunus
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  4. W. Z. W. Hasan
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  5. S. Shafie
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  6. O. Sidek
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Correspondence to H. Jaafar.

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Jaafar, H., Beh, K.S., Yunus, N.A.M. et al. A comprehensive study on RF MEMS switch. Microsyst Technol 20, 2109–2121 (2014). https://doi.org/10.1007/s00542-014-2276-7

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  • DOI: https://doi.org/10.1007/s00542-014-2276-7

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