Skip to main content
SpringerLink
Log in

Kinematic design of a redundant parallel mechanism for maskless lithography optical instrument manipulations

  • Technical Paper
  • Published:
Microsystem Technologies Aims and scope Submit manuscript

Abstract

A new precision parallel mechanism having actuation redundancy will be introduced in this paper. Physical contribution of the actuation redundancy for the precision parallel mechanism is reviewed. In addition, several kinematic configurations have been analyzed for degrees of freedom verification and actuation redundancy. A new kinematic configuration which is 4-[P P]PS is suggested. The suggested 4-[P P]PS mechanism which has actuation redundancy provides six degrees of freedom to the mobile platform. For position control and path planning of the mobile platform, the inverse and the forward kinematics are solved for closed-form solutions. In order to verify the inverse and the forward kinematics, a numerical simulation result is presented. In addition to the inverse and forward accuracy proof, the numerical analysis provides other information such as independent translation motion, calibrated rotation arm at tilting motion, and symmetric motion at rotating motion.

This is a preview of subscription content, log in via an institution to check access.

Access this article

Log in via an institution

Price excludes VAT (USA)
Tax calculation will be finalised during checkout.

Instant access to the full article PDF.

Institutional subscriptions

Fig. 1
Fig. 2
Fig. 3
Fig. 4
Fig. 5
Fig. 6
Fig. 7
Fig. 8
Fig. 9
Fig. 10
Fig. 11
Fig. 12

Similar content being viewed by others

References

  • Binnig G, Rohrer H, Gerber C, Weibel E (1982) Surface studies by scanning tunneling microscopy. Phys Rev Lett 49:57–61

    Article  Google Scholar 

  • Chen M-Y, Huang H-H, Hung S-K (2010) A new design of a submicropositioner utilizing electromagnetic actuators and flexure mechanism. Ind Electron IEEE Trans 57(1):96–106

    Article  Google Scholar 

  • Franklin N, Wang Q, Tombler T, Javey A, Shim M, Dai H (2002) Integration of suspended carbon nanotube arrays into electronic devices and electromechanical systems. Appl Phys Lett 81(5):913–915

    Article  Google Scholar 

  • Ihn YS, Kim Y, Choi H, Lee S, Koo J (2009) Implementation of graspless handling system for microparticles using AFM probe. In: Proceedings of the 2009 IEEE/RSJ International conference on intelligent robots and systems, pp 1843–1848

  • Kar I, Behera L (2009) Visual motor control of a 7 DOF robot manipulator using a fuzzy SOM network. Intel Serv Robot 3(1):49–60

    Article  Google Scholar 

  • Kim W, Trumper D (1998) High-precision magnetic levitation stage for photolithography. Precis Eng 22(2):66–77

    Article  Google Scholar 

  • Kim D-H, Pak K, Park J, Levchenko A, Sun Y (2009) Microengineered platforms for cell mechanobiology. Annu Rev Biomed Eng 11:203–233

    Article  Google Scholar 

  • Lai L, Gu G-Y, Li P, Zhu L (2011) Design of a decoupled 2-DOF translational parallel micro-positioning stage. In: 2011 IEEE international conference on robotics and automation (ICRA), pp 5070–5075

  • Li Y, Xu Q (2009) Design and analysis of a totally decoupled flexure-based XY parallel micromanipulator. Robot IEEE Trans 25(3):645–657

    Article  Google Scholar 

  • Li Y, Xu Q (2009) Modeling and performance evaluation of a flexure-based XY parallel micromanipulator. Mech Mach Theory 44(12):2127–2152

    Article  MATH  Google Scholar 

  • Morgan B, McGee J, Ghodssi R (2007) Automated two-axes optical fiber alignment using grayscale technology. J Microelectromech Syst 16(1):102–110

    Article  Google Scholar 

  • Ru C, Zhang Y, Sun Y, Zhong Y, Sun X, Hoyle D, Cotton I (2011) Automated four-point probe measurement of nanowires inside a scanning electron microscope. Nanotechnol IEEE Trans 10(4):674–681

    Article  Google Scholar 

  • Ryoo H, Kang DW, Hahn JW (2011) Analysis of the line pattern width and exposure efficiency in maskless lithography using a digital micromirror device. Microelectron Eng 88:3145–3149

    Article  Google Scholar 

  • Sitti M (2007) Microscale and nanoscale robotics systems [Grand Challenges of Robotics]. Robot Autom Mag IEEE 14(1):53–60

    Article  Google Scholar 

  • Stewart D (1965) A Platform with six degrees of freedom. In: Proceedings of the institution of mechanical engineers, vol 180, pp 371–386

  • Verma S, Jong Kim W (2004) Six-axis nanopositioning device with precision magnetic levitation technology. Mechatron IEEE/ASME Trans 9(2):384–391

    Article  Google Scholar 

  • Verma S, Jong Kim W (2005) Multi-axis maglev nanopositioner for precision manufacturing and manipulation applications. Ind Appl IEEE Trans 41(5):1159–1167

    Article  Google Scholar 

  • Verma S, Shakir H, Kim W (2006) Novel electromagnetic actuation scheme for multiaxis nanopositioning. Magn IEEE Trans 42(8):2052–2062

    Article  Google Scholar 

  • Zhang H, Hutmacher D, Chollet F, Poo A, Burdet E (2005) Microrobotics and MEMS-based fabrication techniques for scaffold-based tissue engineering. Macromol Biosci 5(6):477–489

    Article  Google Scholar 

  • Zhao Y, Gao F (2009) Dynamic formulation and performance evaluation of the redundant parallel manipulator. Robot Comput-Integr Manufact 25:770–781

    Article  Google Scholar 

Download references

Acknowledgments

This research was supported by Basic Science Research Program through the National Research Foundation of Korea (NRF) funded by the Ministry of Education, Science and Technology (2012R1A1A2044558).

Author information

Authors and Affiliations

  1. School of Mechanical Engineering, Sungkyunkwan University, Suwon, 440-746, Korea

    Yong Seok Ihn, Hyungpil Moon, Hyouk Ryeol Choi & Ja Choon Koo

  2. Division of Applied Robot Technology, Korea Institute of Industrial Technology, Ansan, Korea

    Sang-Hoon Ji

Authors
  1. Yong Seok Ihn
    View author publications

    You can also search for this author in PubMed Google Scholar

  2. Sang-Hoon Ji
    View author publications

    You can also search for this author in PubMed Google Scholar

  3. Hyungpil Moon
    View author publications

    You can also search for this author in PubMed Google Scholar

  4. Hyouk Ryeol Choi
    View author publications

    You can also search for this author in PubMed Google Scholar

  5. Ja Choon Koo
    View author publications

    You can also search for this author in PubMed Google Scholar

Corresponding author

Correspondence to Ja Choon Koo.

Rights and permissions

Reprints and permissions

About this article

Check for updates. Verify currency and authenticity via CrossMark

Cite this article

Ihn, Y.S., Ji, SH., Moon, H. et al. Kinematic design of a redundant parallel mechanism for maskless lithography optical instrument manipulations. Microsyst Technol 20, 1479–1490 (2014). https://doi.org/10.1007/s00542-014-2145-4

Download citation

  • Received:

  • Accepted:

  • Published:

  • Issue Date:

  • DOI: https://doi.org/10.1007/s00542-014-2145-4

Keywords

Search

Navigation