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Novel self-compensation method to lower the temperature drift of a quartz MEMS gyroscope

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Abstract

A new self-compensation method is proposed in this paper. The impedance of a quartz tuning fork changes along with the temperature. A digital driving circuit is designed so that the frequency can be adjusted by controlling the phase. The relationship between the driving amplitude and the temperature is captured in a digital circuit, which can reflect the temperature information. As the relationship is nonlinear, after third-order fitting, the temperature has a precision of 2.356 °C. Finally, the bias stability is optimized and the drift decreases to 1.7 %.

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Acknowledgments

Thanks for the grants of School of Optoelectronics in Beijing Institute of Technology. This work is supported by Natural Science Foundation of China (Grant no. 61027007).

Conflict of interest

The authors declare no conflict of interest.

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Authors and Affiliations

  1. School of Optoelectronics, Beijing Institute of Technology, Beijing, 100081, China

    Lihui Feng, Ke Zhao, Yu-nan Sun, Fang Cui, Jianmin Cui & Aiying Yang

  2. Department of Electrical Engineering, Center on Optical Wireless Applications, Pennsylvania State University, University Park, PA, 16802, USA

    Wenjun Gu

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  1. Lihui Feng
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  2. Wenjun Gu
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  3. Ke Zhao
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  4. Yu-nan Sun
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  5. Fang Cui
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Correspondence to Lihui Feng.

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Feng, L., Gu, W., Zhao, K. et al. Novel self-compensation method to lower the temperature drift of a quartz MEMS gyroscope. Microsyst Technol 20, 2231–2237 (2014). https://doi.org/10.1007/s00542-014-2113-z

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  • DOI: https://doi.org/10.1007/s00542-014-2113-z

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