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Micro cam system driven by electrostatic comb-drive actuators based on SOI-MEMS technology

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Abstract

This paper reports a design and fabrication process of a micro cam system (MCS) with a flat-faced translating follower. The cam rim with cover diameter of 2.4 mm is driven by four electrostatic comb-drive actuators (ECA). Reciprocating motion of the ECAs is converted to unidirectional rotating movement of the outer cam rim through ratchet and anti-reverse mechanisms. The MCS was fabricated by using SOI (silicon on insulator) wafer with 30 μm thick device layer, and only one mask. Driven by periodic voltage with different frequencies, the performance of the MCS was successfully tested. In our experiment, when the system was run by the minimal driving voltage of 80 V, the obtained stroke of the follower was 160 μm. In addition, the system can run smoothly while applying the force of 31.3 μN on the follower. The MCS can be applied in micro valve structures, in micro assembling systems, etc.

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Abbreviations

DRIE:

Deep reactive ion-etching

ECA:

Electrostatic comb-drive actuator

IC:

Integrated circuit

MEMS:

Micro electro-mechanical system

MM:

Micro mechanism

MCS:

Micro cam system

MRM:

Micro rotational motor

SOI:

Silicon on insulator

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Acknowledgments

This work is supported by the National Foundation for Science and Technology Development-NAFOSTED, (Project number: 107.01-2013.07), Ministry of Science and Technology of Vietnam.

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Authors and Affiliations

  1. School of Mechanical Engineering, Hanoi University of Science and Technology, 1-Daicoviet, Hanoi, Vietnam

    Phuc Hong Pham, Toan Khac Dinh, Lam Bao Dang & Khoa Tuan Nguyen

  2. Queensland Micro and Nanotechnology Centre, Griffith University, Parklands Drive, Southport, QLD, 4222, Australia

    Dzung Viet Dao

Authors
  1. Phuc Hong Pham
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  2. Toan Khac Dinh
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  3. Lam Bao Dang
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  4. Khoa Tuan Nguyen
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  5. Dzung Viet Dao
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Correspondence to Lam Bao Dang.

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Pham, P.H., Dinh, T.K., Dang, L.B. et al. Micro cam system driven by electrostatic comb-drive actuators based on SOI-MEMS technology. Microsyst Technol 21, 699–706 (2015). https://doi.org/10.1007/s00542-014-2086-y

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  • DOI: https://doi.org/10.1007/s00542-014-2086-y

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