Abstract
This paper presents the design, fabrication and characterization of a low-noise Z-axis micromachined gyroscope. A triple-mass scheme is adopted to obtain a decoupled mode and matched vibration structure. The gyroscope was fabricated based on a 30-μm silicon on insulator wafer. A DRIE, lag-effect-based, dicing-free process was used to easily and rapidly create the gyroscope devices without requiring normal dicing. The fabricated gyroscopes were vacuum packaged (pressure of approximately 2,000 Pa) and tested. The measured power spectral density of the noises is as low as 17.5 μV/√Hz, and the resolution of the fabricated gyroscope is 7.1 × 10–4°/s/√Hz (2.52°/h/√Hz).
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Acknowledgments
This work is supported by Shaanxi Science and Technology Projects (No. 2011KTCQ01-26), Xi’an science and technology plan projects (No. CX12178-2), and the Basic Research Foundation of NWPU (No. JC20110214). The authors would also like to acknowledge Dr. Xu Jinghui for his valuable suggestions.
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Xie, J., Shen, Q., Hao, Y. et al. Design, fabrication and characterization of a low-noise Z-axis micromachined gyroscope. Microsyst Technol 21, 625–630 (2015). https://doi.org/10.1007/s00542-014-2068-0
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DOI: https://doi.org/10.1007/s00542-014-2068-0