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Microfabrication of thin film temperature sensor for cryogenic measurement

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Abstract

In this paper, thin film Pt temperature microsensor in the temperature range of 10–100 K for cryogenic engineering applications is proposed and researched. The sensor is designed with two structures, and they are obtained by micro fabrication technology. The sensors are annealed in different conditions. The degree crystallization and grain size are analyzed by X-ray diffraction and SEM for both as-deposited and annealed sensors. The resistance dependency on temperature test result shows that when temperature is larger and smaller than 50 K, the average temperature coefficient resistance (TCR) of rectangular shape sensor could achieve 3,118 ppm/K and above 257 ppm/K, respectively. Meanwhile, TCR of circular shape sensor is 2,778 ppm/K and above 249 ppm/K, respectively. The good thermal cycle stability is observed. After three cycles between 10 and 100 K, the maximum resistance variation values are 0.0034 and 0.0137 %, which correspond to 0.0082 and 0.061 K temperature shift for the rectangular and circular sensors, respectively. The ΔT/T (%) of rectangular and circular sensors is performed with the magnetic field up to 6T in the temperature range of 10–100 K, and they are within the range of −19.84 to 0.137 and −2.18 to 11.33 for rectangular and circular sensors,respectively. The impedance test shows that the sensors have the same electric properties under direct current and alternating current condition.

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Acknowledgments

This work is partly supported by the National Natural Science Foundation of China (No. 61076107), the Science and Technology Department of Shanghai (No. 11DZ2290203, 11JC1405700), Program for New Century Excellent Talents in University (2009). The authors are also grateful to the colleagues for their essential contribution to this work.

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Authors and Affiliations

  1. Science and Technology on Micro/Nano Fabrication Laboratory, Shanghai, 200240, China

    Shui-Dong Jiang, Jing-Quan Liu, Bin Yang, Hong-Ying Zhu & Chun-Sheng Yang

  2. Institute of Micro and Nano Science and Technology, Shanghai Jiao Tong University, Shanghai, 200240, China

    Shui-Dong Jiang, Jing-Quan Liu, Bin Yang, Hong-Ying Zhu & Chun-Sheng Yang

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  1. Shui-Dong Jiang
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  2. Jing-Quan Liu
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  3. Bin Yang
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  4. Hong-Ying Zhu
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  5. Chun-Sheng Yang
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Correspondence to Jing-Quan Liu.

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Jiang, SD., Liu, JQ., Yang, B. et al. Microfabrication of thin film temperature sensor for cryogenic measurement. Microsyst Technol 20, 451–456 (2014). https://doi.org/10.1007/s00542-013-1982-x

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  • DOI: https://doi.org/10.1007/s00542-013-1982-x

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