Microsystem Technologies

, Volume 20, Issue 3, pp 515–520 | Cite as

Size effect on mechanical properties of TiO2 capped nanotubes investigated using in situ transmission electron microscopy

  • Shao-Hui Kang
  • Te-Hua FangEmail author
  • Tao-Hsing Chen
  • Yu-Jen Hsiao
  • Zheng-Han Hong
  • Cheng-Hsin Chuang
  • Lucio Riccobono
Technical Paper


In situ transmission electron microscopy nanoindentation tests are used to measure the compressive fracture and mechanical properties of individual titanium oxide (TiO2) capped nanotubes. The average critical loads ranged from 3.6 to 9.6 μN. Individual TiO2 capped nanotubes with lengths of 8–10 μm were found to have Young’s modulus values of ~2.2–9.4 GPa and work energy values of ~3.1–6.6 × 10−13 J. The results indicate that the Young’s modulus and tensile strength depend on capped nanotube length.


TiO2 TiO2 Nanotubes Ammonium Fluoride Titanium Foil Electrochemical Anodization 
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This work was partially supported by the National Science Council of Taiwan under grants NSC 100-2811-E-151-001 and NSC 100-2628-E-151-003-MY3 and by the Center for Micro/Nano Science and Technology.


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Copyright information

© Springer-Verlag Berlin Heidelberg 2013

Authors and Affiliations

  • Shao-Hui Kang
    • 1
  • Te-Hua Fang
    • 1
    Email author
  • Tao-Hsing Chen
    • 1
  • Yu-Jen Hsiao
    • 2
  • Zheng-Han Hong
    • 3
  • Cheng-Hsin Chuang
    • 4
  • Lucio Riccobono
    • 5
  1. 1.Department of Mechanical EngineeringNational Kaohsiung University of Applied SciencesKaohsiungTaiwan
  2. 2.National Nano Device LaboratoriesTainanTaiwan
  3. 3.Mold and Precision Machining Technology Section, Micro/Meso Mechanical Manufacturing R&D DepartmentMetal Industries Research and Development Centre (MIRDC)KaohsiungTaiwan
  4. 4.Department of Mechanical EngineeringSouthern Taiwan UniversityTainanTaiwan
  5. 5.Department of Sciences of the Civil Engineering and ArchitecturePolytechnic of BariBariItaly

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