Abstract
A micromirror actuated by three piezoelectric microcantilevers is presented for optical data tracking of high-density storage application. The microcantilevers are actuated by 2.5-μm-thick lead zirconate titanate (PZT) films which are deposited on the silicon-based substrate by a compatible sol–gel route. The X-ray diffraction result shows that the PZT film is perovskite structure and has a typical good ferroelectric loop. The quasi-static displacement of the mirror plate increases linearly with increasing the driving voltage and the tracking resolution on disk is as high as 8 nm/V. The micromirror also provides a high bandwidth of about 21 kHz, which is high enough to support the optical data tracking of future high-density storage.
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References
Chou PC, Lin YC, Cheng S (2010) A novel seesaw swivel actuator design and fabrication. IEEE Trans Magn 46:2603–2610
Jiang Y, Kanda K, Iga Y, Fujita T, Higuchi K, Maenaka K (2013) Monolithic integration of Pb(Zr, Ti)O3 thin film based resonators using a complete dry microfabrication process. Microsyst Technol 19:137–142
Kim SH, Yee Y, Choi J, Kwon H, Ha MH, Oh C, Bu JU (2004) Integrated MEMS optical flying head with lens positioning actuator for small form factor optical data storage. Sens Actuators A 114:429–437
Kurihara K, Hida M, Umemiya S, Kondo M, Koganezawa S (2006) Rotating symmetrical piezoelectric microactuators for magnetic head drives. Jpn J Appl Phys 45:7471–7474
Li JH, Wang CH, Ma J, Liu MW (2013) Micromachined ultrasonic transducers based on lead zirconate titanate (PZT) films. Microsyst Technol 19:211–218
Liu HM, Zhao QL, Cao MS, Yuan J, Duan ZX, Qiu CJ (2008) Electromechanical properties of microcantilever actuated by enhanced piezoelectric PZT thick film. Chin Phy Lett 25:4128–4130
Lu J, Ikehara T, Zhang Y, Mihara T, Itoh T, Maeda R (2009) High quality factor silicon cantilever driven by piezoelectric thin film actuator for resonant based mass detection. Microsyst Technol 15:1163–1169
Yang JP, Deng XC, Chong TC (2005) An electro-thermal bimorph-based microactuator for precise track-positioning of optical disk drives. J Micromech Microeng 15:958–965
Yang JP, Low LN, Johnson D (2007) A MEMS-based tracking milli-mirror for high-density optical disk drives. Sens Actuators A 133:368–374
Yang JP, Lau GK, Tan CP, Chong NB, Thubthimthong B, He ZM (2012) An electro-thermal micro-actuator based on polymer composite for application to dual-stage positioning systems of hard disk drives. Sens Actuators A 187:98–104
Yee Y, Nam HJ, Lee SH, Bu JU, Lee JW (2001) PZT actuated micromirror for fine-tracking mechanism of high-density optical data storage. Sens Actuators A 89:166–173
Zhao QL, Yuan J, Liu HM, Duan ZX, Zhang WT, Qiu CJ, Cao MS (2008) Stationary fluid dynamic behaviour of V-shaped diffuser/nozzle elements for valveless micropump. Chin Phy Lett 25:1359–1361
Zhao QL, Cao MS, Yuan J, Lu R, Wang DW, Zhang DQ (2010) Thickness effect on electrical properties of Pb(Zr0.52Ti0.48)O3 thick films embedded with ZnO nanowhiskers prepared by a hybrid sol-gel route. Mater Lett 64:632–635
Acknowledgments
This project was supported by the National High-Technology Research and Development Program of China under Grant No. 2007AA03Z103, National Natural Science Foundation of China Grant No. 51305005 and 51375016, Beijing Natural Science Foundation under Grant No. 3122013, and Scientific Research Common Program of Beijing Municipal Commission of Education under Grant No. KM201210009004.
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Zhao, Q., Cao, M., Yuan, J. et al. Fabrication and characterization of a piezoelectric micromirror using for optical data tracking of high-density storage. Microsyst Technol 20, 1317–1322 (2014). https://doi.org/10.1007/s00542-013-1931-8
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DOI: https://doi.org/10.1007/s00542-013-1931-8