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Tracking control of a precision stage with integral sliding-mode friction estimator

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Abstract

This work concerns the development of a integral sliding-mode tracking controller with friction estimator for a precision positioning stage. This stage is supported by cross roller guides, therefore, one of the main disturbances during dynamic motion is the friction force. In order to overcome the uncertainties and the effect of friction, an integral sliding-mode controller with uncertainty and disturbance estimation scheme is designed to control the motion of the stage. Comparing with conventional PID controllers, the experimental results show that with this controller the tracking errors can be reduced significantly.

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Acknowledgments

This work is supported by National Science Council of Taiwan under project NSC-100-2221-E-150-031.

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Authors and Affiliations

  1. Department of Automation Engineering, National Formosa University, Yunlin County, 632, Taiwan

    Jing-Chung Shen & Chau-Chia Yan

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  1. Jing-Chung Shen
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  2. Chau-Chia Yan
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Correspondence to Jing-Chung Shen.

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Shen, JC., Yan, CC. Tracking control of a precision stage with integral sliding-mode friction estimator. Microsyst Technol 19, 1731–1736 (2013). https://doi.org/10.1007/s00542-013-1858-0

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  • DOI: https://doi.org/10.1007/s00542-013-1858-0

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