Smart metal sheets by direct functional integration of piezoceramic fibers in microformed structures

Microsystem Technologies volume 20, pages 1131–1140 (2014)Cite this article

Abstract

Microassembly of piezoceramic fibers in micro cavities at the surface of sheet metal is a novel approach for high volume production of smart adaptronic structural metal parts. In this paper a technology, manufacturing processes and characterization results of metal sheets with an active piezo-metal substructure based on directly integrated piezoceramic fibers are described. The processes include micro-milling of cavities in sheet metal, precision grinding of piezoceramic fibers, PECVD insulating layers with high dielectric strength, microassembly and force-locked joining by forming. In experiments, measurements of the surface roughness and geometric parameters of the piezoceramic fibers and micro cavities were performed. Further, the electrical properties of the insulation coatings were measured. The sensor function of the piezo-metal substructure was proven by a mechanical excitation resulting in a proportional measured sensor signal.

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Acknowledgments

This research is supported by the Deutsche Forschungsgemeinschaft (DFG) in context of the Collaborative Research Centre/Transregio 39 PT-PIESA, subproject A2.

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Affiliations

  1. Institute for Machine Tools and Production Processes, Technische Universität Chemnitz, 09107, Chemnitz, Germany

    A. Schubert, V. Wittstock, S. F. Jahn, B. Müller & M. Müller

  2. Fraunhofer Institute for Machine Tools and Forming Technology IWU, Reichenhainer Str. 88, 09126, Chemnitz, Germany

    A. Schubert & H.-J. Koriath

  3. Institute of Physics, Technische Universität Chemnitz, 09107, Chemnitz, Germany

    S. Peter

Authors
  1. A. Schubert
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  2. V. Wittstock
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  3. H.-J. Koriath
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  4. S. F. Jahn
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  5. S. Peter
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  6. B. Müller
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  7. M. Müller
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Correspondence to M. Müller.

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Schubert, A., Wittstock, V., Koriath, HJ. et al. Smart metal sheets by direct functional integration of piezoceramic fibers in microformed structures. Microsyst Technol 20, 1131–1140 (2014). https://doi.org/10.1007/s00542-013-1836-6

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Keywords

  • Sheet Metal
  • Breakdown Voltage
  • Piezoelectric Transducer
  • Structural Health Monitoring
  • Plasma Enhance Chemical Vapor Deposition