Design and fabrication of a micromachined gyroscope with high shock resistance

Zhou, Jian; Jiang, Tao; Jiao, Ji-wei; Wu, Ming

doi:10.1007/s00542-013-1833-9

Technical Paper
Published: 20 June 2013

Design and fabrication of a micromachined gyroscope with high shock resistance

Jian Zhou¹,
Tao Jiang¹,
Ji-wei Jiao² &
Ming Wu²

Microsystem Technologies volume 20, pages 137–144 (2014)Cite this article

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Abstract

In this paper, a tuning fork gyroscope designed for high-g shock environments is presented. This micro gyroscope with 10 kHz designed working frequency is composed of double symmetrical frame structures that are connected by middle coupling beams. Two level elastic stoppers were designed in order to improve the shock resistance of the gyroscope. Slots were etched to reduce damping in the inner bonding regions. By bulk silicon micromachining technology, the gyroscope was fabricated on a 300 μm thickness silicon wafer. The working frequencies of the gyroscope on the driving and sensing modes are 10,240 and 11,160 Hz, respectively. Shock experiments to bare chips indicate that the shock resistance of the gyroscope along X-axis is 15,000 g, Y-axis is 14,000 g and Z-axis is 11,000 g.

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Acknowledgments

This research is supported by National Natural Science Foundation of China under Grant No.51075305. This support is gratefully acknowledged. However, any opinions, findings or conclusions expressed in this paper are those of the authors and not necessarily reflect the views of the sponsor.

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Authors and Affiliations

School of Mechanical Engineering, Tongji University, 4800 Caoan Road, Shanghai, 201804, People’s Republic of China
Jian Zhou & Tao Jiang
State Key Laboratory of Transducer Technology, Shanghai Institute of Microsystem and Information Technology, Chinese Academy of Sciences, 865 Changning Road, Shanghai, 200050, People’s Republic of China
Ji-wei Jiao & Ming Wu

Authors

Jian Zhou
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Tao Jiang
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Ji-wei Jiao
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Ming Wu
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Correspondence to Tao Jiang.

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Zhou, J., Jiang, T., Jiao, Jw. et al. Design and fabrication of a micromachined gyroscope with high shock resistance. Microsyst Technol 20, 137–144 (2014). https://doi.org/10.1007/s00542-013-1833-9

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Received: 12 December 2012
Accepted: 28 May 2013
Published: 20 June 2013
Issue Date: January 2014
DOI: https://doi.org/10.1007/s00542-013-1833-9

Keywords

Stopper
Shock Load
Shock Test
Shock Experiment
Shock Environment