Skip to main content

Fabrication of microstructures on different materials by diode-pumped solid state laser writing for microfluidics applications


Laser writing attached many attentions for fabrication micro-channels in microfluidics devices and lab-on-chip devices for biomedical applications. In this study, micro-channels were fabricated on different materials as masters using nanosecond diode-pumped solid state (DPSS) laser writing for imprinting on glass and polymer microfluidics devices. Good quality microstructures were fabricated on silicon, nickel alloy, cooper/brass and alumina, respectively by laser writing which proved that the nanosecond DPSS laser is suitable for rapid prototyping and rapid manufacturing of surface microstructures on different substrates as mask-less exposure system of imprinting.

This is a preview of subscription content, access via your institution.

Fig. 1
Fig. 2
Fig. 3
Fig. 4
Fig. 5
Fig. 6
Fig. 7
Fig. 8
Fig. 9
Fig. 10
Fig. 11
Fig. 12
Fig. 13
Fig. 14
Fig. 15


  • Aura S, Franssila S (2010) Combined photolithography and embossing for fabrication of multilevel, free standing microfluidic structures. 14th ICMSCLS, Groningen

    Google Scholar 

  • Chen Q, Chen Q, Milanese D, Ferraris M (2009) Micro-structures fabrication on glasses for micro-fluidics by imprinting technique. Microsys Technol 15:1067–1107

    Article  Google Scholar 

  • Chen Q, Chen Q, Maccioni G, Ferrero S, Scaltrito L, Sacco A (2010) Fabrication of micro-structures on Nickel alloy by DPSS laser ablation technique for lab-on-chip applications. In: Proceedings of SPIE, optical trapping and optical micromanipulation, vol. 7762, p 776239

  • Chen Q, Chen Q, Maccioni G (2011) Fabrication of large-area microfluidics structures on glass by imprinting and diode-pumped solid state laser writing techniques. Microsyst Technol 17:1611–1619

    Article  Google Scholar 

  • Cheng J-Y, Yen M-H, Wei C-W et al (2005) Crack free direct writing on glass using a low–power UV laser in the manufacture of a microfluidic chip. J Micromech Microeng 15:1147–1156

    Article  Google Scholar 

  • Komori M, Uchiyama H, Takebe H et al (2008) Micro/nanoimprinting of glass under high temperature using a CVD diamond mold. J Micromech Microeng 18(1–9):065013

    Article  Google Scholar 

  • Kurnia W, Yoshino M (2009) Nano/micro structure fabrication of metal surfaces using the combination of nano plastic forming, coating and roller imprinting processes. J Micromech Microeng 19:125028

    Article  Google Scholar 

  • Marco CD, Suriano R (2012) Femtosecond laser fabrication and characterization of microchannels and waveguides in methacrylate-based polymers. Microsyst Technol 18:183–190

    Article  Google Scholar 

  • Martynova L, Locascio LE, Gaitan M et al (1997) Fabrication of plastic microfluid channels by imprinting methods. Anal Chem 69:4783–4789

    Article  Google Scholar 

  • Mathur A, Roy SS (2009) Characterisation of PMMA microfluidic channels and devices fabricated by hot embossing and sealed by direct bonding. Curr Appl Phys 9:1199–1202

    Article  Google Scholar 

  • Sun Q, Saliminia A, Th´eberge F (2008) Microchannel fabrication in silica glass by femtosecond laser pulses with different central wavelengths. J Micromech Microeng 18:035–039

    Google Scholar 

  • Takahashi M, Murakoshi Y, Maeda R, Hasegawa K (2006) Large area micro hot embossing of pyrex glass with GC mold machined by dicing. Microsys Technol 13:379–384

    Article  Google Scholar 

  • Watson WLM, Abdelgawad M (2006) Microcontact printing-based fabrication of digital microfluidic devices. Anal Chem 78:7877–7885

    Article  Google Scholar 

  • Whitesides GM (2006) The origins and the future of microfluidics. Nature 442(7101):368–373

    Article  Google Scholar 

  • Youn SW, Ueno A, Takahashi M, Maeda R (2009) A process of glassy carbon etching without the micro masking effect for the fabrication of a mold with a high-quality surface. Microelectron Eng 19(125010):1–8

    Google Scholar 

  • Zhao X, Shin YC (2011) Femtosecond laser drilling of high-aspect ratio microchannels in glass. Appl Phys A 104:713–719

    Article  Google Scholar 

Download references

Author information

Authors and Affiliations


Corresponding author

Correspondence to Qiuling Chen.

Rights and permissions

Reprints and Permissions

About this article

Cite this article

Chen, Q., Maccioni, G., Chen, Q. et al. Fabrication of microstructures on different materials by diode-pumped solid state laser writing for microfluidics applications. Microsyst Technol 19, 1185–1194 (2013).

Download citation

  • Received:

  • Accepted:

  • Published:

  • Issue Date:

  • DOI:


  • Nickel Alloy
  • Microfluidics Device
  • Computer Numerical Control
  • Silicon Master
  • Laser Writing