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Fabrication of microstructures on different materials by diode-pumped solid state laser writing for microfluidics applications

Abstract

Laser writing attached many attentions for fabrication micro-channels in microfluidics devices and lab-on-chip devices for biomedical applications. In this study, micro-channels were fabricated on different materials as masters using nanosecond diode-pumped solid state (DPSS) laser writing for imprinting on glass and polymer microfluidics devices. Good quality microstructures were fabricated on silicon, nickel alloy, cooper/brass and alumina, respectively by laser writing which proved that the nanosecond DPSS laser is suitable for rapid prototyping and rapid manufacturing of surface microstructures on different substrates as mask-less exposure system of imprinting.

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Correspondence to Qiuling Chen.

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Chen, Q., Maccioni, G., Chen, Q. et al. Fabrication of microstructures on different materials by diode-pumped solid state laser writing for microfluidics applications. Microsyst Technol 19, 1185–1194 (2013). https://doi.org/10.1007/s00542-012-1718-3

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  • DOI: https://doi.org/10.1007/s00542-012-1718-3

Keywords

  • Nickel Alloy
  • Microfluidics Device
  • Computer Numerical Control
  • Silicon Master
  • Laser Writing