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Equivalent area nonlinear static and dynamic analysis of electrostatically actuated microstructures

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Abstract

Nonlinear dynamic investigation of electrostatically actuated micro-electro-mechanical-system (MEMS) microcantilever structures is presented. The nonlinear analysis aims to better quantify, than the linear model, the instability threshold associated with electrostatically actuated MEMS structures, where the pull-in voltage of the microcantilever is determined using a phase portrait analysis of the microsystem. The microcantilever is modeled as a lumped mass-spring system. The nonlinear electrostatic force is incorporated into the lumped microsystem through an equivalent area of the microcantilever for a given electrostatic potential. Electro-mechanical force balance plots are obtained for various electrostatic potentials from which the static equilibrium positions of the microcantilever are obtained and the respective conservative energy values are determined. Subsequently, phase portrait plots are obtained for the corresponding energy values from which the pull-in voltage is estimated for the microsystem. This pull-in voltage value is in good agreement with the previously published results for the same geometric and material parameters. The results obtained for linear electrostatic models are also presented for comparison.

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Authors and Affiliations

  1. Optical Microsystems Laboratory, CONCAVE Research Center, Department of Mechanical and Industrial Engineering, Concordia University, Montreal, H3G 1M8, Canada

    Rakesh Kalyanaraman, Gino Rinaldi, Muthukumaran Packirisamy & Rama Bhat

Authors
  1. Rakesh Kalyanaraman
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  2. Gino Rinaldi
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  3. Muthukumaran Packirisamy
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  4. Rama Bhat
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Correspondence to Muthukumaran Packirisamy.

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Kalyanaraman, R., Rinaldi, G., Packirisamy, M. et al. Equivalent area nonlinear static and dynamic analysis of electrostatically actuated microstructures. Microsyst Technol 19, 61–70 (2013). https://doi.org/10.1007/s00542-012-1621-y

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  • DOI: https://doi.org/10.1007/s00542-012-1621-y

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