Abstract
The sensitivity of surface-stress based cantilever sensor can be significantly increased by using polymer as the cantilever material. In our previous research, parylene nanomechanical cantilevers with integrated poly-crystal silicon piezoresistors have already been developed for biochemical applications. However, parylene cantilevers exhibit different behaviors compared with their more rigid counterparts. In this paper, a new analytical model has been developed and verified using finite element simulations. The design optimization has also been discussed based on the new analytical model, resulting in several useful design guidelines that are unique to parylene or more generally to polymer cantilevers with integrated poly-crystal or single-crystal silicon piezoresistors for surface stress sensing.
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Zheng, Q., Xu, Y. Design and optimization of parylene nanomechanical cantilevers with integrated piezoresistors for surface-stress based biochemical sensing. Microsyst Technol 17, 351–359 (2011). https://doi.org/10.1007/s00542-011-1275-1
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DOI: https://doi.org/10.1007/s00542-011-1275-1