Abstract
A multi-dimensional force measurement device often plays an important role in micro robotic manipulations. Due to the high level required accuracy and physical dimensions of the sensors, they are normally fabricated through a series of MEMS process which makes the sensors not only prohibitive but also vulnerable to an excessive loading operation environment. In this article, an inexpensive force measurement using strain gauges is developed and tested. Combining a mechanical structure optimization and signal processing technique, the present work provides a fairly precise force measurement in sub-micron Newton scale. In addition, the developed concept is expanded to a dual axis force measurement which extends its application to the micro particle robotic manipulations.
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References
Bicchi A, Salisbury JK, Brock DL (1993) Contact sensing from force measurements. Int J Robot Res 12(3):249–262
Bicchi A, Caiti A, Prattichizzo D (1999) Optimal design of dynamic multi-axis force/torque sensor. In: Proceedings of the 38th, conference on decision and control, vol 3, pp 2981–2986
Chen H, Kirubarajan T, Bar-Shalom Y (2003) Performance limits of track to-track fusion versus centralized estimation: theory and application. IEEE Trans Aerosp Electron Syst 39(2):386–400
Haddab Y, Chen Q, Lutz P (2009) Improvement of strain gauges micro-forces measurement using Kalman optimal filtering. Int J IFAC Mechatronics 19(4):457–462
Kemper M (2004) Development of a Tactile low-cost microgripper with integrated force sensor. In: Proceedings of the IEEE international conference on control applications, vol 2, pp 1461–1466
Kalman RE (1960) A new approach to linear filtering and prediction problems, transactions of the ASME. J Basic Eng 85(D):35–45
Lu Z, Luo H, Chen PCY, Lin W (2006a) An integrated probe sensor for micro-force measurement. Meas Sci Technol 17(4):869–875
Lu Z, Luo H, Chen PCY, Lin W (2006b) Force sensing and control in micromanipulation. IEEE Trans Syst Man Cybern 36(6):713–724
Menciassi A, Eisinberg A, Carrozza MC, Dario P (2003) Force sensing microinstrument for measuring tissue properties and pulse in microsurgery. IEEE/ASME Trans Mechatronics 8(1):10–17
Phung TC, Ha SH, Ihn YS, Choi BJ, Lee SM, Koo JC, Choi HR (2009) An enhanced force and contact position sensor for micro-manipulations. Int J Control Autom Syst 7(3):459–467
Qiang G, Harris CJ (2001) Comparison of two measurement fusion methods for Kalman-filter-based multisensor data fusion. IEEE Trans Aerosp Electron Syst 37(1):273–279
Roecker J, McGillem C (1998) Comparison of two-sensor tracking methods based on state vector fusion and measurement fusion. IEEE Trans Aerosp Electron Syst 24(4):447–449
Smith D, Singh S (2006) Approaches to multi sensor data fusion in target tracking: a survey. IEEE Trans Knowl Data Eng 18(12):1696–1710
Sun S-L, Deng Z-L (2004) Multi-sensor optimal information fusion Kalman filter. Automatica 40(6):1017–1023
Willer D, Chang CB, Dunn KP (1976) Kalman filter algorithms for a multl-sensor system. In: Proceedings of the 15th, conference on decision and control, pp 570–574
Acknowledgments
This research was supported by the MKE (The Ministry of Knowledge Economy), Korea, under the Next Generation Robot Actuator/Sensor Research Center support program supervised by the NIPA (National IT Industry Promotion Agency) (NIPA-2010-C7000-1001-008)
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Kim, Y.C., Ihn, Y.S., Moon, H. et al. Low cost dual axis micro force sensor for robotic manipulations. Microsyst Technol 17, 1197–1205 (2011). https://doi.org/10.1007/s00542-011-1269-z
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DOI: https://doi.org/10.1007/s00542-011-1269-z