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Pt/3C-SiC electrothermal cantilever for MEMS-based mixers

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Abstract

Microelectromechanical resonators are currently applied as MEMS-based mixers-filter for communication systems. Silicon carbide, as a material with high potentiality to replace silicon material, can be utilised in the design of MEMS-based mixers. A Pt/SiC electrothermal actuator, resonating at fundamental frequency of 117.1 kHz, was fabricated and designed to perform frequency mixing. Two signals were multiplied and the sum, as well as the difference, was used to drive the fabricated cantilever into resonance.

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Acknowledgments

The author would like to thank Dr. Alun Harris, from University of Newcastle Upon Tyne, for his suggestion to carry out this work.

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  1. Department of Mechanical Engineering, Faculty of Engineering, Sudan University of Sciences and Technology, Southern Campus, Khartoum, Sudan

    Musaab Hassan

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  1. Musaab Hassan
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Correspondence to Musaab Hassan.

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Hassan, M. Pt/3C-SiC electrothermal cantilever for MEMS-based mixers. Microsyst Technol 17, 425–428 (2011). https://doi.org/10.1007/s00542-011-1233-y

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  • DOI: https://doi.org/10.1007/s00542-011-1233-y

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