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Piezoelectric micromachined ultrasonic transducer based on dome-shaped piezoelectric single layer

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Abstract

In this paper, we proposed a dome-shaped model for piezoelectric micromachined ultrasonic transducer structure. A finite element analysis was carried out to study the elecro-mechanical behaviour of the dome-shaped model as well as the conventional model. The result showed that a considerable improvement of electro-mechanical coupling performance was achieved with the dome-shaped model.

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Acknowledgments

This work was supported by the National Natural Science Foundation of China (Grant No. 10904093), the Science and Technology Grant Scheme funds from Shenzhen Government (No.08CXY-23) and the Natural Science Foundation from Shenzhen University (No. 200919).

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Authors and Affiliations

  1. Department of Biomedical Engineering, School of Medicine, Shenzhen University, Shenzhen, 518060, Guangdong, China

    J. Peng & H. Tang

  2. Research Institute of Innovative Products and Technologies, The Hong Kong Polytechnic University, Hong Kong, China

    C. Chao

Authors
  1. J. Peng
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  2. C. Chao
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  3. H. Tang
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Correspondence to J. Peng.

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Peng, J., Chao, C. & Tang, H. Piezoelectric micromachined ultrasonic transducer based on dome-shaped piezoelectric single layer. Microsyst Technol 16, 1771–1775 (2010). https://doi.org/10.1007/s00542-010-1114-9

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  • DOI: https://doi.org/10.1007/s00542-010-1114-9

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