Abstract
A new three-phase electrode array with a serpentine electrode is designed and prototyped using PolyMUMPs process for micro flow pumping. Numerical model of the micropump has been developed using COMSOL Multiphysics™. Experimental testing is conducted and time-averaged flow velocities from testing and simulation agree well. Peak time-averaged flow velocity of 270 μm/s is achieved at 30 Hz using ethanol.
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Thanks go to CNIB and National Science and Engineering Research Council of Canada (NSERC) for their support.
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Xie, K., Lai, Y., Guo, X. et al. A three phase serpentine micro electrode array for AC electroosmotic flow pumping. Microsyst Technol 16, 1825–1830 (2010). https://doi.org/10.1007/s00542-010-1106-9
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DOI: https://doi.org/10.1007/s00542-010-1106-9