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Review of atomic MEMS: driving technologies and challenges

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Abstract

Atomic MEMS technology is an emerging multidisciplinary subject which benefits from different fields, including microfabrication, laser technique and atomic physics, etc. This paper gives an overview of atomic MEMS and discusses the challenges faced in the design and manufacture of atomic MEMS devices.

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Acknowledgments

This work is supported by the grant of Key Programs of National Science Foundation of China under Grant No. 60736025 and Major Programs of China National Space Administration under Grant No. D2120060013. The authors would like to thank Prof. Lei Guo, Prof. Gang Liu, Prof. Wei Sheng, Dr. Ye Hong and all the staffs in the Novel Inertial Instrument and Navigation System Laboratory of BUAA for their support and beneficial discussion about the paper.

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Authors and Affiliations

  1. Sino–UK Space Science and Technology Joint Laboratory, School of Instrumentation Science and Opto-electronics Engineering, Beijing University of Aeronautics and Astronautics, New Mainbuilding B603, Xueyuan Rd. 37 #, Haidian District, Beijing, 100191, China

    Haifeng Dong, Jiancheng Fang, Binquan Zhou, Jie Qin & Shuangai Wan

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  1. Haifeng Dong
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  2. Jiancheng Fang
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Correspondence to Haifeng Dong.

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Dong, H., Fang, J., Zhou, B. et al. Review of atomic MEMS: driving technologies and challenges. Microsyst Technol 16, 1683–1689 (2010). https://doi.org/10.1007/s00542-010-1089-6

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